Deposition of Large-Area and Protective Diamond-like Carbon Coatings on Glass Substrates by Low-Pressure Dielectric Barrier Discharges

2010 ◽  
Vol 16 (7-9) ◽  
pp. 203-205 ◽  
Author(s):  
Jinhai Niu ◽  
Dongping Liu ◽  
Yangbiao Ou ◽  
Yuting You ◽  
Naisen Yu
2017 ◽  
Vol 407 ◽  
pp. 412-417 ◽  
Author(s):  
Weimin Chen ◽  
Xiaoyan Zhou ◽  
Xiaotao Zhang ◽  
Jie Bian ◽  
Shukai Shi ◽  
...  

2019 ◽  
Vol 17 (2) ◽  
pp. 1900169 ◽  
Author(s):  
Detlef Loffhagen ◽  
Markus M. Becker ◽  
Dirk Hegemann ◽  
Bernard Nisol ◽  
Sean Watson ◽  
...  

Plasma ◽  
2021 ◽  
Vol 4 (2) ◽  
pp. 281-293
Author(s):  
Dariusz Korzec ◽  
Florian Hoppenthaler ◽  
Anatoly Shestakov ◽  
Dominik Burger ◽  
Andrej Shapiro ◽  
...  

The piezoelectric cold plasma generators (PCPG) allow for production of the piezoelectric direct discharge (PDD), which is a kind of cold atmospheric pressure plasma (APP). The subjects of this study are different arrays of PCPGs for large-area treatment of planar substrates. Two limiting factors are crucial for design of such arrays: (i) the parasitic coupling between PCPGs resulting in minimum allowed distance between devices, and (ii) the homogeneity of large area treatment, requiring an overlap of the activation zones resulting from each PCPG. The first limitation is investigated by the use of electric measurements. The minimum distance for operation of 4 cm between two PCPGs is determined by measurement of the energy coupling from an active PCPG to a passive one. The capacitive probe is used to evaluate the interference between signals generated by two neighboring PCPGs. The second limitation is examined by activation image recording (AIR). Two application examples illustrate the compromising these two limiting factors: the treatment of large area planar substrates by PCPG array, and the pretreatment of silicon wafers with an array of PCPG driven dielectric barrier discharges (DBD).


Sign in / Sign up

Export Citation Format

Share Document