scholarly journals Synthesis of high-refractive index sulfur containing polymers for 193-nm immersion lithography; a progress report

2006 ◽  
Author(s):  
Idriss Blakey ◽  
Will Conley ◽  
Graeme A. George ◽  
David J. T. Hill ◽  
Heping Liu ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Progress Report ◽  
Immersion Lithography ◽  
193 Nm ◽  
Sulfur Containing

High refractive index fluids for second-generation 193-nm immersion lithography

2007 ◽  
Author(s):  
Akifumi Kagayama ◽  
Hiroko Wachi ◽  
Yoshimichi Namai ◽  
Shin Fukuda
Keyword(s):  
Refractive Index ◽  
Second Generation ◽  
High Refractive Index ◽  
Immersion Lithography ◽  
193 Nm

High refractive index nanoparticle fluids for 193-nm immersion lithography

2009 ◽  
Author(s):  
Markos Trikeriotis ◽  
Robert Rodriguez ◽  
Michael F. Zettel ◽  
Aristeidis Bakandritsos ◽  
Woo Jin Bae ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Immersion Lithography ◽  
193 Nm

A study of 193-nm immersion lithography using novel high refractive index fluids

2006 ◽  
Vol 83 (4-9) ◽  
pp. 651-654 ◽  
Author(s):  
Julius Santillan ◽  
Akihiko Otoguro ◽  
Toshiro Itani ◽  
Kiyoshi Fujii ◽  
Akifumi Kagayama ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Immersion Lithography ◽  
193 Nm

scholarly journals High refractive index immersion fluids for 193 nm immersion lithography

2005 ◽  
Author(s):  
Bridgette Budhlall ◽  
Gene Parris ◽  
Peng Zhang ◽  
Xiaoping Gao ◽  
Zarka Zarkov ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Immersion Lithography ◽  
193 Nm

scholarly journals High Refractive Index Fluid for Next Generation ArF Immersion Lithography

2006 ◽  
Vol 19 (5) ◽  
pp. 641-646 ◽  
Author(s):  
Taiichi Furukawa ◽  
Katsuhiko Hieda ◽  
Yong Wang ◽  
Takashi Miyamatsu ◽  
Kinji Yamada ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Next Generation ◽  
Immersion Lithography

High refractive index materials design for the next generation ArF immersion lithography

2008 ◽  
Author(s):  
Taiichi Furukawa ◽  
Takanori Kishida ◽  
Kyouyuu Yasuda ◽  
Tsutomu Shimokawa ◽  
Zhi Liu ◽  
...  
Keyword(s):  
Refractive Index ◽  
Materials Design ◽  
High Refractive Index ◽  
Next Generation ◽  
Immersion Lithography

Synthesis and characterization of phosphorus- and sulfur-containing aromatic polyimides for high refractive index

Polymer ◽  
2018 ◽  
Vol 136 ◽  
pp. 143-148 ◽  
Author(s):  
Hyeonil Kim ◽  
Bon-Cheol Ku ◽  
Munju Goh ◽  
Hyeonuk Yeo ◽  
Heung Cho Ko ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Synthesis And Characterization ◽  
Aromatic Polyimides ◽  
Sulfur Containing

Sulfur containing optical plastics and its ophthalmic lenses applications

e-Polymers ◽  
2008 ◽  
Vol 8 (1) ◽  
Author(s):  
G. S. Jha ◽  
G. Seshadri ◽  
A. Mohan ◽  
R. K. Khandal
Keyword(s):  
Refractive Index ◽  
Fiber Optics ◽  
High Refractive Index ◽  
Linear Optics ◽  
Non Linear Optics ◽  
Plastic Materials ◽  
Different Types ◽  
Optical Applications ◽  
Sulfur Containing ◽  
Optical Plastics

AbstractPlastics produced from the sulfur-based monomer are excellent materials with many optical applications such as ophthalmic lenses, fiber optics and non- linear optics. High refractive index plastic materials are able to reduce the curvature, edge and center thickness of lenses. Sulfur containing plastics such as sulfide, polysulfide, and sulfur containing vinyl compound, thioacrylate, polythiol and isocyanate/isothiocyanate based monomers have demonstrated high refractive index, high Abbe number, good impact strength, excellent machinability, good tintability and good transmittance. In the present article, various sulfur containing plastics with different types of monomers for ophthalmic lens applications are reviewed.

Sign in / Sign up

Export Citation Format

Share Document