Performance of the aerial image measurement system for 157-nm lithography

2003 ◽  
Author(s):  
Peter Kuschnerus ◽  
Thomas Engel ◽  
Wolfgang Harnisch ◽  
Claudia Hertfelder ◽  
Axel M. Zibold ◽  
...  
Keyword(s):  
Measurement System ◽  
Aerial Image ◽  
Image Measurement

Application of the aerial image measurement system (AIMS)TM to the analysis of binary mask imaging and resolution enhancement techniques

1994 ◽  
Author(s):  
Ronald M. Martino ◽  
Richard A. Ferguson ◽  
Russell A. Budd ◽  
John L. Staples ◽  
Lars W. Liebmann ◽  
...  
Keyword(s):  
Measurement System ◽  
Resolution Enhancement ◽  
Aerial Image ◽  
Binary Mask ◽  
Image Measurement

New mask evaluation tool: the microlithography simulation microscope aerial image measurement system

1994 ◽  
Author(s):  
Russell A. Budd ◽  
Derek B. Dove ◽  
John L. Staples ◽  
H. Nasse ◽  
Wilhelm Ulrich
Keyword(s):  
Measurement System ◽  
Aerial Image ◽  
Evaluation Tool ◽  
Image Measurement

Development and application of a new tool for lithographic mask evaluation, the stepper equivalent Aerial Image Measurement System, AIMS

1997 ◽  
Vol 41 (1.2) ◽  
pp. 119-129 ◽  
Author(s):  
R. A. Budd ◽  
D. B. Dove ◽  
J. L. Staples ◽  
R. M. Martino ◽  
R. A. Ferguson ◽  
...  
Keyword(s):  
Measurement System ◽  
Aerial Image ◽  
Image Measurement ◽  
Lithographic Mask

Aerial Image Measurement System for 157 nm Lithography

2002 ◽  
Author(s):  
Klaus Eisner ◽  
Peter Kuschnerus ◽  
Jan-Peter Urbach ◽  
Christof M. Schilz ◽  
Thomas Engel ◽  
...  
Keyword(s):  
Measurement System ◽  
Aerial Image ◽  
Image Measurement

Application of an aerial image measurement system to mask fabrication and analysis

1994 ◽  
Author(s):  
Richard A. Ferguson ◽  
Ronald M. Martino ◽  
Russell A. Budd ◽  
John L. Staples ◽  
Lars W. Liebmann ◽  
...  
Keyword(s):  
Measurement System ◽  
Aerial Image ◽  
Image Measurement ◽  
Mask Fabrication

A Three-dimensional Camera: Development and Applications of a Three-dimensional Image Measurement System

2011 ◽  
Vol 131 (2) ◽  
pp. 320-328 ◽  
Author(s):  
Cunwei Lu ◽  
Hiroya Kamitomo ◽  
Ke Sun ◽  
Kazuhiro Tsujino ◽  
Genki Cho
Keyword(s):  
Measurement System ◽  
Three Dimensional ◽  
Image Measurement ◽  
Dimensional Image
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