Defect reduction strategies for submicron manufacturing: tools and methodologies

1991 ◽  
Author(s):  
Robyn S. Coleman ◽  
Prasanna R. Chitturi
Keyword(s):  
Defect Reduction ◽  
Reduction Strategies

Defect reduction strategies for the manufacture of contoured laminates using vacuum BAG-only prepregs

2015 ◽  
Vol 38 (9) ◽  
pp. 2016-2025 ◽  
Author(s):  
Yijia Ma ◽  
Timotei Centea ◽  
Steven R. Nutt
Keyword(s):  
Defect Reduction ◽  
Reduction Strategies

Defect reduction in oxygen implanted silicon-on-insulator material during high-temperature annealing

1989 ◽  
Vol 47 ◽  
pp. 604-605
Author(s):  
P. Roitman ◽  
B. Cordts ◽  
S. Visitserngtrakul ◽  
S.J. Krause
Keyword(s):  
High Temperature ◽  
Annealing Temperature ◽  
Silicon On Insulator ◽  
High Dose ◽  
High Temperature Annealing ◽  
High Current ◽  
Defect Reduction ◽  
Annealing Step ◽  
Multiple Cycle ◽  
Defect Densities

Synthesis of a thin, buried dielectric layer to form a silicon-on-insulator (SOI) material by high dose oxygen implantation (SIMOX – Separation by IMplanted Oxygen) is becoming an important technology due to the advent of high current (200 mA) oxygen implanters. Recently, reductions in defect densities from 109 cm−2 down to 107 cm−2 or less have been reported. They were achieved with a final high temperature annealing step (1300°C – 1400°C) in conjunction with: a) high temperature implantation or; b) channeling implantation or; c) multiple cycle implantation. However, the processes and conditions for reduction and elimination of precipitates and defects during high temperature annealing are not well understood. In this work we have studied the effect of annealing temperature on defect and precipitate reduction for SIMOX samples which were processed first with high temperature, high current implantation followed by high temperature annealing.

Psychometric and normative-focused reduction strategies for the 2009 aJDI

2010 ◽  
Author(s):  
Michael T. Sliter ◽  
Scott A. Withrow ◽  
Michelle H. Balzer ◽  
Michelle H. Brodke ◽  
Jennifer Z. Gillespie ◽  
...  
Keyword(s):  
Reduction Strategies

Alcohol Reduction Strategies--Current Confidence

2011 ◽  
Author(s):  
Erin E. Bonar ◽  
Harold Rosenberg ◽  
Erica Hoffmann ◽  
Shane W. Kraus ◽  
Elizabeth Kryszak ◽  
...  
Keyword(s):  
Reduction Strategies ◽  
Alcohol Reduction
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