Line-profile and critical-dimension correlation between a normal-incidence optical CD metrology system and SEM

2002 ◽  
Author(s):  
Weidong Yang ◽  
Roger Lowe-Webb ◽  
Rahul Korlahalli ◽  
Vera G. Zhuang ◽  
Hiroki Sasano ◽  
...  
Keyword(s):  
Line Profile ◽  
Normal Incidence ◽  
Critical Dimension ◽  
Metrology System

scholarly journals Normal-incidence spectroscopic ellipsometry for critical dimension monitoring

2001 ◽  
Vol 78 (25) ◽  
pp. 3983-3985 ◽  
Author(s):  
Hsu-Ting Huang ◽  
Wei Kong ◽  
Fred Lewis Terry
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Normal Incidence ◽  
Critical Dimension

Contrast of Filament Bright Rims

1994 ◽  
Vol 144 ◽  
pp. 365-367
Author(s):  
E. V. Kononovich ◽  
O. B. Smirnova ◽  
P. Heinzel ◽  
P. Kotrč
Keyword(s):  
High Altitude ◽  
Line Profile ◽  
Line Center ◽  
Magnetic Structures ◽  
The Mean

AbstractThe Hα filtergrams obtained at Tjan-Shan High Altitude Observatory near Alma-Ata (Moscow University Station) were measured in order to specify the bright rims contrast at different points along the line profile (0.0; ± 0.25; ± 0.5; ± 0.75 and ± 1.0 Å). The mean contrast value in the line center is about 25 percent. The bright rims interpretation as the bases of magnetic structures supporting the filaments is suggested.

Frequency Redistribution Effects in the Formation of Lyman α in Prominences and Their Influence on the Ratio of Hα to Lα

1979 ◽  
Vol 44 ◽  
pp. 53-55
Author(s):  
R.W. Milkey ◽  
J.N. Heasley ◽  
E.J. Schmahl ◽  
O. Engvold
Keyword(s):  
Line Profile ◽  
Large Fraction ◽  
Partial Frequency ◽  
Frequency Redistribution ◽  
Partial Frequency Redistribution ◽  
Emergent Intensity

The effect of partial frequency redistribution in the formation of Lyman α in the chromosphere has been discussed by Milkey and Mihalas (1973) and others, and it has been shown that in this case the coherency of scattering in the wings of the line substantially influences the line profile. Although there are non-negligible sources for La photons within a prominence, a large fraction of the emergent line photons are due to scattering of photons incident on the surface of the prominence so that one expects that in a prominence the frequency redistribution processes will play an important role in determining the emergent intensity.

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