Line-profile and critical dimension measurements using a normal incidence optical metrology system

2003 ◽  
Author(s):  
Weidong Yang ◽  
R. Lowe-Webb ◽  
R. Korlahalli ◽  
V. Zhuang ◽  
H. Sasano ◽  
...  
Keyword(s):  
Line Profile ◽  
Normal Incidence ◽  
Critical Dimension ◽  
Optical Metrology ◽  
Metrology System

Line-profile and critical-dimension correlation between a normal-incidence optical CD metrology system and SEM

2002 ◽  
Author(s):  
Weidong Yang ◽  
Roger Lowe-Webb ◽  
Rahul Korlahalli ◽  
Vera G. Zhuang ◽  
Hiroki Sasano ◽  
...  
Keyword(s):  
Line Profile ◽  
Normal Incidence ◽  
Critical Dimension ◽  
Metrology System

scholarly journals Coupling characterization and noise studies of the optical metrology system onboard the LISA Pathfinder mission

2010 ◽  
Vol 49 (29) ◽  
pp. 5665 ◽  
Author(s):  
Gerald Hechenblaikner ◽  
Rüdiger Gerndt ◽  
Ulrich Johann ◽  
Peter Luetzow-Wentzky ◽  
Vinzenz Wand ◽  
...  
Keyword(s):  
Optical Metrology ◽  
Lisa Pathfinder ◽  
Metrology System

Ray-based calibration for the micro optical metrology system

2014 ◽  
Author(s):  
Yongkai Yin ◽  
Meng Wang ◽  
Ameng Li ◽  
Xiaoli Liu ◽  
Xiang Peng
Keyword(s):  
Optical Metrology ◽  
Metrology System
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