Measurement results on after-etch resist coated features on the new Leica Microsystems' LWM270 DUV critical dimension metrology system

2004 ◽  
Author(s):  
John M. Whittey ◽  
Walter Steinberg
Keyword(s):  
Critical Dimension ◽  
Measurement Results ◽  
Metrology System

Line-profile and critical-dimension correlation between a normal-incidence optical CD metrology system and SEM

2002 ◽  
Author(s):  
Weidong Yang ◽  
Roger Lowe-Webb ◽  
Rahul Korlahalli ◽  
Vera G. Zhuang ◽  
Hiroki Sasano ◽  
...  
Keyword(s):  
Line Profile ◽  
Normal Incidence ◽  
Critical Dimension ◽  
Metrology System

Information capacity and bandwidth limitations in the SEM

1989 ◽  
Vol 47 ◽  
pp. 84-85
Author(s):  
D. C. Joy ◽  
R. D. Bunn
Keyword(s):  
Signal To Noise Ratio ◽  
Critical Dimension ◽  
Information Capacity ◽  
Acquisition Time ◽  
Signal To Noise ◽  
Sem Image ◽  
Probe Size ◽  
Minimum Number ◽  
Noise Ratio ◽  
Signal Channel

The information available from an SEM image is limited both by the inherent signal to noise ratio that characterizes the image and as a result of the transformations that it may undergo as it is passed through the amplifying circuits of the instrument. In applications such as Critical Dimension Metrology it is necessary to be able to quantify these limitations in order to be able to assess the likely precision of any measurement made with the microscope.The information capacity of an SEM signal, defined as the minimum number of bits needed to encode the output signal, depends on the signal to noise ratio of the image - which in turn depends on the probe size and source brightness and acquisition time per pixel - and on the efficiency of the specimen in producing the signal that is being observed. A detailed analysis of the secondary electron case shows that the information capacity C (bits/pixel) of the SEM signal channel could be written as :

How do we sedate children undergoing CSF opening pressure measurement? Results of a Germany-wide survey

2011 ◽  
Vol 42 (S 01) ◽  
Author(s):  
D Tibussek ◽  
F Distelmaier ◽  
S Kummer ◽  
E Mayatepek
Keyword(s):  
Pressure Measurement ◽  
Opening Pressure ◽  
Measurement Results

State special primary acceleration measurement standard for gravimetry GET 190-2019

2020 ◽  
pp. 3-8
Author(s):  
L.F. Vitushkin ◽  
F.F. Karpeshin ◽  
E.P. Krivtsov ◽  
P.P. Krolitsky ◽  
V.V. Nalivaev ◽  
...  
Keyword(s):  
High Precision ◽  
Free Fall ◽  
Measurement Range ◽  
Measurement Standard ◽  
Acceleration Measurement ◽  
Measurement Systems ◽  
Free Fall Acceleration ◽  
Investigation Methods ◽  
Measurement Results ◽  
Upper Level

The State special primary acceleration measurement standard for gravimetry (GET 190-2019), its composition, principle of operation and basic metrological characteristics are presented. This standard is on the upper level of reference for free-fall acceleration measurements. Its accuracy and reliability were improved as a result of optimisation of the adjustment procedures for measurement systems and its integration within the upgraded systems, units and modern hardware components. A special attention was given to adjusting the corrections applied to measurement results with respect to procedural, physical and technical limitations. The used investigation methods made it possibled to confirm the measurement range of GET 190-2019 and to determine the contributions of main sources of errors and the total value of these errors. The measurement characteristics and GET 90-2019 were confirmed by the results obtained from measurements of the absolute value of the free fall acceleration at the gravimetrical site “Lomonosov-1” and by their collation with the data of different dates obtained from measurements by high-precision foreign and domestic gravimeters. Topicality of such measurements ensues from the requirements to handle the applied problems that need data on parameters of the Earth gravitational field, to be adequately faced. Geophysics and navigation are the main fields of application for high-precision measurements in this field.

Development of reference materials with the composition of propyl and isopropyl alcohol solutions

2020 ◽  
pp. 66-72
Author(s):  
Irina A. Piterskikh ◽  
Svetlana V. Vikhrova ◽  
Nina G. Kovaleva ◽  
Tatyana O. Barynskaya
Keyword(s):  
Reference Materials ◽  
Measurement Errors ◽  
Isopropyl Alcohol ◽  
Certified Reference Materials ◽  
Toxic Substances ◽  
Biological Objects ◽  
Margin Of Error ◽  
Measurement Results ◽  
And Control ◽  
Characteristic Mass

Certified reference materials (CRM) composed of propyl (11383-2019) and isopropyl (11384-2019) alcohols solutions were created for validation of measurement procedures and control of measurement errors of measurement results of mass concentrations of toxic substances (alcohol) in biological objects (urine, blood) and water. Two ways of establishing the value of the certified characteristic – mass consentration of propanol-1 or propanol-2 have been studied. The results obtained by the preparation procedure and comparison with the standard are the same within the margin of error.

Problems of ensuring metrological traceability of measurement results of indicators of quality for food products and food raw materials

2020 ◽  
pp. 64-70
Author(s):  
Mariya Y. Medvedevskikh ◽  
Anna S. Sergeeva
Keyword(s):  
Reference Materials ◽  
Mass Fraction ◽  
Nutritional Value ◽  
Animal Feed ◽  
Raw Materials ◽  
Meat Products ◽  
Metrological Traceability ◽  
Food Products ◽  
Freeze Dried ◽  
Measurement Results

The article raises the problem of ensuring metrological traceability of the measurement results of indicators of quality and nutritional value for food products and food raw materials: water (moisture), nitrogen (protein, crude protein), fat, ash and carbohydrates. The problem under consideration can be solved by applying reference materials of food composition, traceable to state primary measurement standards GET 173-2017 and GET 176-2019 and primary reference measurement procedures (PRMP), for attestation of measurement procedures and accuracy checking of measurement results. The article discusses the results of the PRMP development of mass fraction of fat, ash and carbohydrates in food products and food raw materials, as well as mass fraction of crude fat (oil content) in oil crops seeds and products based on them. The paper also presents metrological characteristics of reference materials of composition of dry dairy products, grain-milk dry porridges for nutrition of babies, grain dry porridges for nutrition of babies, egg powder, freeze-dried meat products, animal feed. The results of the work allow for building a chain of metrological traceability from GET 173-2017, GET 176-2019 and PRMP to routine measurement procedures, thereby ensuring the uniformity of measurements of nutritional value of food products.

Analysis of the effects of seismic interference on the measurement results of gravitational acceleration by ballistic laser gravimeters

2020 ◽  
Vol 0 (1) ◽  
pp. 51-61
Author(s):  
Олександр Іванович Вінніченко ◽  
Павло Іванович Неєжмаков ◽  
Анатолій Васильович Омельченко ◽  
Олексій Валерійович Федоров ◽  
Володимир Федорович Болюх
Keyword(s):  
Gravitational Acceleration ◽  
Measurement Results
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