Design and performance of a normal-incidence optical critical dimension metrology system

2002 ◽  
Author(s):  
W.A. McGahan ◽  
J.M. Holden ◽  
P.I. Rovira ◽  
R. Lowe-Webb ◽  
R.A. Yarussi ◽  
...  
Keyword(s):  
Normal Incidence ◽  
Critical Dimension ◽  
And Performance ◽  
Metrology System

Line-profile and critical-dimension correlation between a normal-incidence optical CD metrology system and SEM

2002 ◽  
Author(s):  
Weidong Yang ◽  
Roger Lowe-Webb ◽  
Rahul Korlahalli ◽  
Vera G. Zhuang ◽  
Hiroki Sasano ◽  
...  
Keyword(s):  
Line Profile ◽  
Normal Incidence ◽  
Critical Dimension ◽  
Metrology System

Thermal performance of a solar oven with augmented sunlight concentration

2007 ◽  
Vol 18 (2) ◽  
pp. 4-10 ◽  
Author(s):  
M.J. Brooks
Keyword(s):  
Thermal Performance ◽  
Operating Temperature ◽  
Incidence Angle ◽  
Normal Incidence ◽  
Operating Conditions ◽  
Partial Shading ◽  
Test Range ◽  
Efficiency Performance ◽  
And Performance ◽  
Sky Conditions

This paper describes the thermal performance of a novel solar oven that incorporates a compact reflec-tive lens, or ring array, to augment sunlight concen-tration. Performance is reported in terms of the pos-itive effect of the ring array versus a non-concen-trating lid, maximum operating temperature, ther-mal efficiency, performance under partly cloudy skies, and the effects of incidence angle and track-ing. Use of the ring array lens improved thermal efficiency by 4% in the test range up to 100°C, while boosting the maximum operating temperature from 138°C to 196°C. Comparative tests conducted under clear sky conditions against two other com-mercial types showed that when tracked in the azimuth plane at near-normal incidence angles, the new design generated maximum cooking power of 300 W and boiled water at a rate 13% faster than the next best commercial oven tested. Augmented sunlight concentration sensitised the new design to higher angles of incidence and performance was negatively affected in the non-tracked state. Under non-ideal operating conditions, including partial shading by cloud, the oven outperformed both commercial units.

Monochromatic X-ray and XUV Imaging with Multilayer Optics

1988 ◽  
Vol 102 ◽  
pp. 175-180 ◽  
Author(s):  
A.B.C. Walker ◽  
J. Lindblom ◽  
R.B. Hoover ◽  
T.W. Barbee
Keyword(s):  
Normal Incidence ◽  
Optical Systems ◽  
Performance Measurements ◽  
X Ray ◽  
Solar Observations ◽  
Spherical Mirrors ◽  
And Performance

AbstractThe development of techniques for the fabrication of multilayer coated mirrors which can function as energy selective X-ray and XUV mirrors at normal incidence has greatly expanded the options available to the astronomical spectroscopist. We have developed a rocket spectroheliograph which utilizes multilayer optics in three configurations: i) As Cassegrain telescopes for imaging at 256 Å (He II) and 173 Å (Fe IX, X); ii) As tertiary mirrors used with a conventional Wolter I telescope for imaging at 44 Å (Si XI, XII), 173 Å, and 256 Å; iii) As off-axis spherical mirrors for imaging at 44 Å and 256 Å. We report on laboratory images and performance measurements obtained with these optical systems, and briefly on Solar Observations.

Implementation and performance of the metrology system for the multi-object optical and near-infrared spectrograph MOONS

2016 ◽  
Author(s):  
Holger Drass ◽  
Leonardo Vanzi ◽  
Miguel Torres-Torriti ◽  
Rolando Dünner ◽  
Tzu-Chiang Shen ◽  
...  
Keyword(s):  
Near Infrared ◽  
And Performance ◽  
Metrology System
Sign in / Sign up

Export Citation Format

Share Document