High-performance 193-nm positive resist using alternating polymer system of functionalized cyclic olefins/maleic anhydride

2000 ◽  
Author(s):  
Katsuji Douki ◽  
Toru Kajita ◽  
Tsutomu Shimokawa
Keyword(s):  
Maleic Anhydride ◽  
High Performance ◽  
Polymer System ◽  
Cyclic Olefins ◽  
193 Nm ◽  
Positive Resist

High-performance 193-nm resist composition using hybrid copolymers of cycloolefin/maleic anhydride (COMA)/methacrylate

2002 ◽  
Author(s):  
Dalil Rahman ◽  
Eric L. Alemy ◽  
Will Conley ◽  
Daniel Miller ◽  
Ralph R. Dammel ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
High Performance ◽  
Hybrid Copolymers ◽  
193 Nm

Design and development of high-performance 193-nm positive resist based on functionalized poly(cyclicolefins)

1999 ◽  
Author(s):  
Pushkara R. Varanasi ◽  
J. Maniscalco ◽  
Ann M. Mewherter ◽  
Margaret C. Lawson ◽  
George M. Jordhamo ◽  
...  
Keyword(s):  
High Performance ◽  
Design And Development ◽  
193 Nm ◽  
Positive Resist

Progress toward developing high-performance 193-nm single-layer positive resist based on functionalized poly(norbornenes)

2000 ◽  
Author(s):  
Pushkara R. Varanasi ◽  
George M. Jordhamo ◽  
Margaret C. Lawson ◽  
K. Rex Chen ◽  
William R. Brunsvold ◽  
...  
Keyword(s):  
High Performance ◽  
Single Layer ◽  
193 Nm ◽  
Positive Resist

scholarly journals The Copolymerization of Cyclic Olefins with Maleic Anhydride

1965 ◽  
Vol 38 (12) ◽  
pp. 2082-2087 ◽  
Author(s):  
Shunsuke Murahashi ◽  
Shun’ichi Nozakura ◽  
Katsutoshi Yasufuku
Keyword(s):  
Maleic Anhydride ◽  
Cyclic Olefins

Adhesion-promoted copolymers based on norbornene derivatives and maleic anhydride for 193-nm photoresists

Polymer ◽  
2000 ◽  
Vol 41 (22) ◽  
pp. 8035-8039 ◽  
Author(s):  
J.-B Kim ◽  
H.-J Yun ◽  
Y.-G Kwon ◽  
B.-W Lee
Keyword(s):  
Maleic Anhydride ◽  
193 Nm ◽  
Norbornene Derivatives

A redox mediator doped gel polymer as an electrolyte and separator for a high performance solid state supercapacitor

2015 ◽  
Vol 3 (7) ◽  
pp. 4035-4041 ◽  
Author(s):  
Guofu Ma ◽  
Miaomiao Dong ◽  
Kanjun Sun ◽  
Enke Feng ◽  
Hui Peng ◽  
...  
Keyword(s):  
Activated Carbon ◽  
Sulfuric Acid ◽  
Solid State ◽  
Polyvinyl Alcohol ◽  
High Performance ◽  
Indigo Carmine ◽  
Polymer System ◽  
Redox Mediator ◽  
Gel Electrolyte

A stable and effective redox-mediator gel electrolyte has been prepared by doping indigo carmine (IC) into a polyvinyl alcohol sulfuric acid polymer system (PVA–H2SO4), and a high performance solid state supercapacitor is fabricated by utilizing activated carbon as electrodes and the prepared gel polymer (PVA–H2SO4–IC) as an electrolyte and separator.

Synthesis of Cycloolefin−Maleic Anhydride Alternating Copolymers for 193 nm Imaging

1997 ◽  
Vol 30 (21) ◽  
pp. 6517-6524 ◽  
Author(s):  
F. M. Houlihan ◽  
T. I. Wallow ◽  
O. Nalamasu ◽  
E. Reichmanis
Keyword(s):  
Maleic Anhydride ◽  
Alternating Copolymers ◽  
193 Nm

Base additives for use in a single layer 193-nm resist based upon poly(norbornene/maleic anhydride/acrylic acid/ tert -butyl acrylate)

2001 ◽  
Author(s):  
Francis M. Houlihan ◽  
Donna Person ◽  
Omkaram Nalamasu ◽  
Ilya Rushkin ◽  
Ognian N. Dimov ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
Acrylic Acid ◽  
Butyl Acrylate ◽  
Single Layer ◽  
Tert Butyl ◽  
193 Nm
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