High-performance 193-nm resist composition using hybrid copolymers of cycloolefin/maleic anhydride (COMA)/methacrylate

2002 ◽  
Author(s):  
Dalil Rahman ◽  
Eric L. Alemy ◽  
Will Conley ◽  
Daniel Miller ◽  
Ralph R. Dammel ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
High Performance ◽  
Hybrid Copolymers ◽  
193 Nm

Novel hybrid copolymers of cycloolefin/maleic anhydride (COMA)/methacrylate for 193-nm resist compositions

2001 ◽  
Author(s):  
M. D. Rahman ◽  
Douglas S. McKenzie ◽  
Jun-Bom Bae ◽  
Takanori Kudo ◽  
Woo-Kyu Kim ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
Hybrid Copolymers ◽  
193 Nm

193 nm resist composition using hybrid copolymers of cycloolefin/maleic anhydride (COMA)/methacrylate

2006 ◽  
Author(s):  
M. Dalil Rahman ◽  
Srivanisan Chakrapani ◽  
Clement Anyadiegwu ◽  
Guanyang Lin ◽  
Allen Timko ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
Hybrid Copolymers ◽  
193 Nm

Adhesion-promoted copolymers based on norbornene derivatives and maleic anhydride for 193-nm photoresists

Polymer ◽  
2000 ◽  
Vol 41 (22) ◽  
pp. 8035-8039 ◽  
Author(s):  
J.-B Kim ◽  
H.-J Yun ◽  
Y.-G Kwon ◽  
B.-W Lee
Keyword(s):  
Maleic Anhydride ◽  
193 Nm ◽  
Norbornene Derivatives

Synthesis of Cycloolefin−Maleic Anhydride Alternating Copolymers for 193 nm Imaging

1997 ◽  
Vol 30 (21) ◽  
pp. 6517-6524 ◽  
Author(s):  
F. M. Houlihan ◽  
T. I. Wallow ◽  
O. Nalamasu ◽  
E. Reichmanis
Keyword(s):  
Maleic Anhydride ◽  
Alternating Copolymers ◽  
193 Nm

Base additives for use in a single layer 193-nm resist based upon poly(norbornene/maleic anhydride/acrylic acid/ tert -butyl acrylate)

2001 ◽  
Author(s):  
Francis M. Houlihan ◽  
Donna Person ◽  
Omkaram Nalamasu ◽  
Ilya Rushkin ◽  
Ognian N. Dimov ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
Acrylic Acid ◽  
Butyl Acrylate ◽  
Single Layer ◽  
Tert Butyl ◽  
193 Nm

scholarly journals High-Performance Adhesives Based on Maleic Anhydride-g-EPDM Rubbers and Polybutene for Laminating Cast Polypropylene Film and Aluminum Foil

Coatings ◽  
2019 ◽  
Vol 9 (1) ◽  
pp. 61 ◽  
Author(s):  
Sang-Hyub Lee ◽  
Se-Woo Yang ◽  
Eun-Suk Park ◽  
Ji-Young Hwang ◽  
Dai-Soo Lee
Keyword(s):  
Maleic Anhydride ◽  
High Performance ◽  
Aluminum Foil ◽  
Chemical Bonds ◽  
Ethylene Propylene Diene Monomer ◽  
Polypropylene Film ◽  
Adhesion Promoter ◽  
Adhesive Thickness ◽  
Amine Groups ◽  
Tempering Time

The adhesion between aluminum (Al) foil and cast polypropylene (CPP) film laminated with mixtures of amorphous- and crystalline-maleic anhydride-grafted ethylene-propylene-diene monomer (MAH-g-EPDM) rubbers and highly reactive polybutene (HRPB) as the adhesives was investigated. Specifically, the HRPB was used as an adhesion promoter of the MAH-g-EPDM rubbers and CPP as well as a compatibilizer of two kinds of MAH-g-EPDM rubbers having limited miscibility. To introduce strong chemical bonds between the MAH-g-EPDM rubbers and Al foil, the surface of Al foil was treated with 3-aminopropyl triethoxysilane (APTES). The weak adhesion between Al foil and MAH-g-EPDM rubbers was improved by imidization between the amine groups (–NH2) of APTES and the maleic anhydride groups (MAH) of MAH-g-EPDM rubbers. The effects of the composition of adhesives, tempering time and adhesive thickness were also studied to optimize the adhesion of the CPP/Al foil laminates. We concluded that MAH-g-EPDM rubber based adhesives containing HRPB can be applied for the lamination of Al foil and CPP films to satisfy the requirements of high-performance packaging materials for various purposes.

Ring opened maleic anhydride and norbornene copolymers (ROMA) have a good character in resist flow process for 193-nm resist technology

2003 ◽  
Author(s):  
Hyun-Sang Joo ◽  
Dong Chul Seo ◽  
Chang Min Kim ◽  
Young Taek Lim ◽  
Seong Duk Cho ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
Flow Process ◽  
193 Nm

Cycloolefin/maleic anhydride copolymers for 193-nm resist compositions

1999 ◽  
Author(s):  
M. D. Rahman ◽  
Ralph R. Dammel ◽  
Michelle M. Cook ◽  
Stanley A. Ficner ◽  
Munirathna Padmanaban ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
193 Nm ◽  
Maleic Anhydride Copolymers
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