Synthesis of Cycloolefin−Maleic Anhydride Alternating Copolymers for 193 nm Imaging

1997 ◽  
Vol 30 (21) ◽  
pp. 6517-6524 ◽  
Author(s):  
F. M. Houlihan ◽  
T. I. Wallow ◽  
O. Nalamasu ◽  
E. Reichmanis
Keyword(s):  
Maleic Anhydride ◽  
Alternating Copolymers ◽  
193 Nm

Evaluation of cycloolefin-maleic anhydride alternating copolymers as single-layer photoresists for 193-nm photolithography

1996 ◽  
Author(s):  
Thomas I. Wallow ◽  
Francis M. Houlihan ◽  
Omkaram Nalamasu ◽  
Edwin A. Chandross ◽  
Thomas X. Neenan ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
Single Layer ◽  
Alternating Copolymers ◽  
193 Nm

Adhesion-promoted copolymers based on norbornene derivatives and maleic anhydride for 193-nm photoresists

Polymer ◽  
2000 ◽  
Vol 41 (22) ◽  
pp. 8035-8039 ◽  
Author(s):  
J.-B Kim ◽  
H.-J Yun ◽  
Y.-G Kwon ◽  
B.-W Lee
Keyword(s):  
Maleic Anhydride ◽  
193 Nm ◽  
Norbornene Derivatives

Base additives for use in a single layer 193-nm resist based upon poly(norbornene/maleic anhydride/acrylic acid/ tert -butyl acrylate)

2001 ◽  
Author(s):  
Francis M. Houlihan ◽  
Donna Person ◽  
Omkaram Nalamasu ◽  
Ilya Rushkin ◽  
Ognian N. Dimov ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
Acrylic Acid ◽  
Butyl Acrylate ◽  
Single Layer ◽  
Tert Butyl ◽  
193 Nm

Alternating copolymers of functionalized α-methyl styrene monomers and maleic anhydride

2015 ◽  
Vol 6 (36) ◽  
pp. 6543-6552 ◽  
Author(s):  
Edward L. Malins ◽  
Carl Waterson ◽  
C. Remzi Becer
Keyword(s):  
Maleic Anhydride ◽  
Tertiary Amine ◽  
Primary Amines ◽  
Alternating Copolymers ◽  
Amine Functionalized ◽  
Reactive Coupling ◽  
Methyl Styrene

Alkyl and tertiary amine functionalized α-methyl styrene (AMS) monomers have been synthesized via reactive coupling of 3-isopropenyl-α,α-dimethylbenzyl isocyanate (TMI) with primary amines.

Ring opened maleic anhydride and norbornene copolymers (ROMA) have a good character in resist flow process for 193-nm resist technology

2003 ◽  
Author(s):  
Hyun-Sang Joo ◽  
Dong Chul Seo ◽  
Chang Min Kim ◽  
Young Taek Lim ◽  
Seong Duk Cho ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
Flow Process ◽  
193 Nm

Cycloolefin/maleic anhydride copolymers for 193-nm resist compositions

1999 ◽  
Author(s):  
M. D. Rahman ◽  
Ralph R. Dammel ◽  
Michelle M. Cook ◽  
Stanley A. Ficner ◽  
Munirathna Padmanaban ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
193 Nm ◽  
Maleic Anhydride Copolymers
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