Cleaning of SCALPEL next-generation lithography masks using PLASMAX, a revolutionary dry cleaning technology

1999 ◽  
Author(s):  
John J. Festa ◽  
Anthony E. Novembre ◽  
Darryl A. Bennett ◽  
Richard J. Kasica ◽  
Brad Bailey ◽  
...  
Keyword(s):  
Next Generation ◽  
Dry Cleaning ◽  
Cleaning Technology ◽  
Next Generation Lithography

Reduce process bias of photomask manufacturing for next-generation lithography

2004 ◽  
Author(s):  
Booky Lee ◽  
Sharon Wang ◽  
Toroy Tian ◽  
Samuel Yang ◽  
Roy Chen
Keyword(s):  
Next Generation ◽  
Next Generation Lithography

E-beam writing: a next-generation lithography approach for thin-film head critical features

2002 ◽  
Vol 38 (1) ◽  
pp. 95-100 ◽  
Author(s):  
R.E. Fontana ◽  
J. Katine ◽  
M. Rooks ◽  
R. Viswanathan ◽  
J. Lille ◽  
...  
Keyword(s):  
Thin Film ◽  
Next Generation ◽  
Next Generation Lithography
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