Non-Aqueous/Dry Cleaning Technology without Causing Damage to Fragile Nano-Structures

2019 ◽  
Vol 25 (5) ◽  
pp. 3-14 ◽  
Author(s):  
Takeshi Hattori
Keyword(s):  
Dry Cleaning ◽  
Nano Structures ◽  
Cleaning Technology

Dry Cleaning Technology for Removal of Silicon Native Oxide Employing Hot NH3/NF3Exposure

2002 ◽  
Vol 41 (Part 1, No. 8) ◽  
pp. 5349-5358 ◽  
Author(s):  
Hiroki Ogawa ◽  
Tomoharu Arai ◽  
Michihiko Yanagisawa ◽  
Takanori Ichiki ◽  
Yasuhiro Horiike
Keyword(s):  
Native Oxide ◽  
Dry Cleaning ◽  
Cleaning Technology

Cleaning of SCALPEL next-generation lithography masks using PLASMAX, a revolutionary dry cleaning technology

1999 ◽  
Author(s):  
John J. Festa ◽  
Anthony E. Novembre ◽  
Darryl A. Bennett ◽  
Richard J. Kasica ◽  
Brad Bailey ◽  
...  
Keyword(s):  
Next Generation ◽  
Dry Cleaning ◽  
Cleaning Technology ◽  
Next Generation Lithography

scholarly journals Solar Powered Unmanned Cleaning Robot

2020 ◽  
Vol 9 (6) ◽  
pp. 451-454
Keyword(s):  
Smart Phone ◽  
Battery Voltage ◽  
Vacuum Cleaner ◽  
Dry Cleaning ◽  
Renewable Source ◽  
Cleaning Robot ◽  
The Status ◽  
Android App ◽  
Solar Powered ◽  
Cleaning Technology

Today, households are becoming smarter and automated. Soon, the non-renewable sources that are used today are going to get exhausted. So, the usage of renewable source of energy is very important. The aim of this project is to develop solar powered unmanned cleaning robot (SPUCR) without human guidance. The developed SPUCR is equipped with dry cleaning technology and controlled by Arduino mega microcontroller. The SPUCR navigates in all direction with the help of motors connected to the wheel. Obstacle sensor is used to detect the obstacles and helps the SPUCR in self-navigation. The LDR fixed with solar panel is used for sensing the solar light and convert it to battery voltage. The status of the battery is displayed using LCD. The IR sensor detects the Vacuum Cleaner status and sends the message via GSM. The location of SPUCR can be found using GPS. All the data are sent to the cloud with the help of WI-FI module. The technology is developed, and usage of smart phone has become wider. So, the navigation, location, battery level and light intensity of the Solar Powered Unmanned Cleaning Robot (SPUCR) can be monitored using the data stored in the cloud and displayed in android app application. The developed project is useful for dry cleaning by the residents and workers. The robot moves by itself without continuous human guidance and cleans the house or office. Thus, saving a lot of time and making it convenient and useful.

Interfacial Layer Control by Dry Cleaning Technology for Polycrystalline and Single Crystalline Silicon Growth

2016 ◽  
Vol 16 (5) ◽  
pp. 4906-4913
Author(s):  
Dong-Hyun Im ◽  
Kong-Soo Lee ◽  
Yoongoo Kang ◽  
Myoungho Jeong ◽  
Kwang Wuk Park ◽  
...  
Keyword(s):  
Interfacial Layer ◽  
Crystalline Silicon ◽  
Single Crystalline Silicon ◽  
Dry Cleaning ◽  
Single Crystalline ◽  
Silicon Growth ◽  
Cleaning Technology ◽  
Layer Control

363. Evaluating Passive Badge Samplers for Perchloroethylene Monitoring in Dry Cleaning Operations

2001 ◽  
Author(s):  
L. Taylor ◽  
G. Burroughs ◽  
D. Marlow ◽  
J. Deddens ◽  
L. Ewers ◽  
...  
Keyword(s):  
Dry Cleaning
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