AUV5500: advanced in situ dry cleaning and metrology process for next generation lithography

2005 ◽  
Author(s):  
Christian Chovino ◽  
Stefan Helbig ◽  
Peter Dress
Keyword(s):  
Next Generation ◽  
Dry Cleaning ◽  
Next Generation Lithography

Cleaning of SCALPEL next-generation lithography masks using PLASMAX, a revolutionary dry cleaning technology

1999 ◽  
Author(s):  
John J. Festa ◽  
Anthony E. Novembre ◽  
Darryl A. Bennett ◽  
Richard J. Kasica ◽  
Brad Bailey ◽  
...  
Keyword(s):  
Next Generation ◽  
Dry Cleaning ◽  
Cleaning Technology ◽  
Next Generation Lithography

scholarly journals In-situ gamma-ray background measurements for next generation CDEX experiment in the China Jinping Underground Laboratory

2021 ◽  
Vol 128 ◽  
pp. 102560
Author(s):  
H. Ma ◽  
Z. She ◽  
W.H. Zeng ◽  
Z. Zeng ◽  
M.K. Jing ◽  
...  
Keyword(s):  
Gamma Ray ◽  
Underground Laboratory ◽  
Next Generation

Reduce process bias of photomask manufacturing for next-generation lithography

2004 ◽  
Author(s):  
Booky Lee ◽  
Sharon Wang ◽  
Toroy Tian ◽  
Samuel Yang ◽  
Roy Chen
Keyword(s):  
Next Generation ◽  
Next Generation Lithography

E-beam writing: a next-generation lithography approach for thin-film head critical features

2002 ◽  
Vol 38 (1) ◽  
pp. 95-100 ◽  
Author(s):  
R.E. Fontana ◽  
J. Katine ◽  
M. Rooks ◽  
R. Viswanathan ◽  
J. Lille ◽  
...  
Keyword(s):  
Thin Film ◽  
Next Generation ◽  
Next Generation Lithography

Development of a platform for single cell genomics using convex lens-induced confinement

Lab on a Chip ◽  
2015 ◽  
Vol 15 (14) ◽  
pp. 3013-3020 ◽  
Author(s):  
Sara Mahshid ◽  
Mohammed Jalal Ahamed ◽  
Daniel Berard ◽  
Susan Amin ◽  
Robert Sladek ◽  
...  
Keyword(s):  
Single Cell ◽  
Base Pair ◽  
Single Cell Analysis ◽  
Lab On A Chip ◽  
Cell Analysis ◽  
Next Generation ◽  
Single Cell Genomics ◽  
Convex Lens ◽  
Genomic Dnas

We present a lab-on-a-chip for the next generation of single-cell genomics, performing full-cycle single-cell analysis by demonstrating mega-base pair genomic DNAs in nanochannels extracted in situ.

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