Multilayer coating and tests of a 10x extreme-ultraviolet lithographic camera

1998 ◽  
Author(s):  
Eberhard A. Spiller ◽  
Frank J. Weber ◽  
Claude Montcalm ◽  
Sherry L. Baker ◽  
Eric M. Gullikson ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coating

Multilayer coating of 10X projection optics for extreme ultraviolet lithography

1999 ◽  
Author(s):  
Claude Montcalm ◽  
Eberhard A. Spiller ◽  
Marco Wedowski ◽  
Eric M. Gullikson ◽  
James A. Folta
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coating ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Projection Optics

Multilayer coating requirements for extreme ultraviolet lithography masks

2002 ◽  
Author(s):  
Scott D. Hector ◽  
Eric M. Gullikson ◽  
Paul B. Mirkarimi ◽  
Eberhard A. Spiller ◽  
Patrick A. Kearney ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coating ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography

Thin film and multilayer coating development for the extreme ultraviolet spectral region

2006 ◽  
Vol 75 (11) ◽  
pp. 1966-1971 ◽  
Author(s):  
D. Garoli ◽  
G. Monaco ◽  
F. Frassetto ◽  
M.G. Pelizzo ◽  
P. Nicolosi ◽  
...  
Keyword(s):  
Thin Film ◽  
Spectral Region ◽  
Extreme Ultraviolet ◽  
Multilayer Coating ◽  
Ultraviolet Spectral Region

Atomic-precision multilayer coating of the first set of optics for an extreme-ultraviolet lithography prototype system

2002 ◽  
Vol 41 (16) ◽  
pp. 3262 ◽  
Author(s):  
Claude Montcalm ◽  
R. Frederick Grabner ◽  
Russell M. Hudyma ◽  
Mark A. Schmidt ◽  
Eberhard Spiller ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coating ◽  
Prototype System ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Atomic Precision
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