Multilayer coating and test of the optics for two new 10× Microstepper extreme-ultraviolet lithography cameras

2001 ◽  
Vol 19 (4) ◽  
pp. 1219 ◽  
Author(s):  
Claude Montcalm ◽  
Eberhard Spiller ◽  
Frank J. Weber ◽  
Marco Wedowski ◽  
James A. Folta ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coating ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography

Multilayer coating of 10X projection optics for extreme ultraviolet lithography

1999 ◽  
Author(s):  
Claude Montcalm ◽  
Eberhard A. Spiller ◽  
Marco Wedowski ◽  
Eric M. Gullikson ◽  
James A. Folta
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coating ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Projection Optics

Multilayer coating requirements for extreme ultraviolet lithography masks

2002 ◽  
Author(s):  
Scott D. Hector ◽  
Eric M. Gullikson ◽  
Paul B. Mirkarimi ◽  
Eberhard A. Spiller ◽  
Patrick A. Kearney ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coating ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography

Atomic-precision multilayer coating of the first set of optics for an extreme-ultraviolet lithography prototype system

2002 ◽  
Vol 41 (16) ◽  
pp. 3262 ◽  
Author(s):  
Claude Montcalm ◽  
R. Frederick Grabner ◽  
Russell M. Hudyma ◽  
Mark A. Schmidt ◽  
Eberhard Spiller ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coating ◽  
Prototype System ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Atomic Precision

Multilayer-coating-induced aberrations in extreme-ultraviolet lithography optics

2001 ◽  
Vol 40 (1) ◽  
pp. 129 ◽  
Author(s):  
Chen Liang ◽  
Michael R. Descour ◽  
Jose M. Sasian ◽  
Scott A. Lerner
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coating ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography

Backbone Degradable Poly(aryl acetal) Photoresist Polymers: Synthesis, Acid Sensitivity, and Extreme Ultraviolet Lithography Performance

2019 ◽  
Vol 52 (3) ◽  
pp. 886-895 ◽  
Author(s):  
Matthias S. Ober ◽  
Duane R. Romer ◽  
John Etienne ◽  
P. J. Thomas ◽  
Vipul Jain ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Acid Sensitivity

Demonstration of phase-shift masks for extreme-ultraviolet lithography

2006 ◽  
Author(s):  
Bruno La Fontaine ◽  
Adam R. Pawloski ◽  
Obert Wood ◽  
Yunfei Deng ◽  
Harry J. Levinson ◽  
...  
Keyword(s):  
Phase Shift ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography
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