Variation in phase defect size on extreme ultraviolet mask before and after reflective multilayer coating

2015 ◽  
Vol 33 (6) ◽  
pp. 06FE02 ◽  
Author(s):  
Tsuyoshi Amano ◽  
Tsukasa Abe
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coating ◽  
Defect Size ◽  
Before And After

Multilayer coating and tests of a 10x extreme-ultraviolet lithographic camera

1998 ◽  
Author(s):  
Eberhard A. Spiller ◽  
Frank J. Weber ◽  
Claude Montcalm ◽  
Sherry L. Baker ◽  
Eric M. Gullikson ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coating

Transient small-scale brightenings in the quiet Sun corona: a model for "campfires" observed with Solar Orbiter

2021 ◽  
Author(s):  
Yajie Chen ◽  
Damien Przybylski ◽  
Hardi Peter ◽  
Hui Tian
Keyword(s):  
Convection Zone ◽  
Extreme Ultraviolet ◽  
Small Scale ◽  
Coronal Emission ◽  
Lower Corona ◽  
Quiet Sun ◽  
Self Consistent ◽  
Before And After ◽  
Field Lines ◽  
The Magnetic Field

<div> <div> <div> <p>Recent observations by the Extreme Ultraviolet Imager (EUI) onboard Solar Orbiter have revealed prevalent small-scale transient brightenings in the quiet solar corona termed campfires. To understand the generation mechanism of these coronal brightenings, we constructed a self- consistent and time-dependent quiet-Sun model extending from the upper convection zone to the lower corona using a realistic 3D radiation MHD simulation. From the model we have synthesized the coronal emission in the EUI 174 Å passband. We identified several transient coronal brightenings similar to those in EUI observations. The size and lifetime of these coronal brightenings are 2–4 Mm and ∼2 min, respectively. These brightenings are located at a height of 2–4 Mm above the photosphere, and the surrounding plasma is often heated above 1 MK. These findings are consistent with the observational characterisation of the campfires. Through a comparison of the magnetic field structures before and after the occurrence of brightenings, we conclude that these coronal brightenings are generated by component magnetic reconnection between interacting bundles of field lines or the relaxation of highly twisted flux ropes. Occurring in the coronal part of the atmosphere, these events show no measurable signature in the photosphere. These transient coronal brightenings may play an important role in heating of the local coronal plasma.</p> </div> </div> </div>

Multilayer coating of 10X projection optics for extreme ultraviolet lithography

1999 ◽  
Author(s):  
Claude Montcalm ◽  
Eberhard A. Spiller ◽  
Marco Wedowski ◽  
Eric M. Gullikson ◽  
James A. Folta
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coating ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Projection Optics

Multilayer coating requirements for extreme ultraviolet lithography masks

2002 ◽  
Author(s):  
Scott D. Hector ◽  
Eric M. Gullikson ◽  
Paul B. Mirkarimi ◽  
Eberhard A. Spiller ◽  
Patrick A. Kearney ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coating ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography

scholarly journals First-Principles Calculations and Experimental Study of H+-Irradiated Zr/Nb Nanoscale Multilayer System

Metals ◽  
2021 ◽  
Vol 11 (4) ◽  
pp. 627
Author(s):  
Roman Laptev ◽  
Leonid Svyatkin ◽  
Dmitriy Krotkevich ◽  
Ekaterina Stepanova ◽  
Natalia Pushilina ◽  
...  
Keyword(s):  
First Principles ◽  
Density Functional ◽  
Multilayer Coating ◽  
Optical Emission ◽  
Positron Beam ◽  
Binding Energies ◽  
Emission Spectrometry ◽  
First Principles Calculations ◽  
Transmission Electron ◽  
Before And After

Nanoscale multilayer coating (NMC) based on Zr/Nb layers (100/100 nm) before and after H+ irradiation was investigated by combining experimental techniques with first-principles calculations. Detailed studies of structural and phase state and defect structure of Zr/Nb NMC were performed using methods of transmission electron microscopy, X-ray structural analysis, glow discharge optical emission spectrometry, and the Doppler broadening spectroscopy using variable energy positron beam. The first-principles calculations of binding energies for hydrogen in metal Zr/Nb layers was carried out by the pseudopotential method within the density functional theory framework. First-principles calculations and experimental data indicate the presence of macro- and microstrains predominantly in the zirconium layers of Zr/Nb NMC. The main feature of the studied Zr/Nb NMC is the predominant hydrogen localization in Zr layers near the interfaces. The annihilation of positrons is shown to occur mainly in the Zr layers in the vicinity of the interface.

Thin film and multilayer coating development for the extreme ultraviolet spectral region

2006 ◽  
Vol 75 (11) ◽  
pp. 1966-1971 ◽  
Author(s):  
D. Garoli ◽  
G. Monaco ◽  
F. Frassetto ◽  
M.G. Pelizzo ◽  
P. Nicolosi ◽  
...  
Keyword(s):  
Thin Film ◽  
Spectral Region ◽  
Extreme Ultraviolet ◽  
Multilayer Coating ◽  
Ultraviolet Spectral Region
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