Acid diffusion control in chemical amplification positive resists by exchange reaction of conjugate bases

1997 ◽  
Author(s):  
Toshio Sakamizu ◽  
Tadashi Arai ◽  
Hidenori Yamaguchi ◽  
Hiroshi Shiraishi
Keyword(s):  
Exchange Reaction ◽  
Diffusion Control ◽  
Chemical Amplification ◽  
Acid Diffusion ◽  
Conjugate Bases

Enhanced Acid Diffusion Control by Using Photoacid Generator Bound Polymer Resist

2015 ◽  
Vol 15 (2) ◽  
pp. 1764-1766 ◽  
Author(s):  
Jin Hyuck Jung ◽  
Min Jeong Kim ◽  
Kyung Hwa Sohn ◽  
Ha Na Kang ◽  
Man Kyu Kang ◽  
...  
Keyword(s):  
Diffusion Control ◽  
Acid Diffusion ◽  
Photoacid Generator

The Effect of Hydrophilic Photoacid Generator on Acid Diffusion in Chemical Amplification Resists

2014 ◽  
Vol 14 (12) ◽  
pp. 9662-9664
Author(s):  
Ha Na Kang ◽  
Jin Hyuck Jung ◽  
Hyun Sang Joo ◽  
Dong Chul Seo ◽  
Haiwon Lee
Keyword(s):  
Chemical Amplification ◽  
Acid Diffusion ◽  
Photoacid Generator

Resolution and LWR improvements by acid diffusion control in EUV lithography

2009 ◽  
Author(s):  
Hideaki Tsubaki ◽  
Tooru Tsuchihashi ◽  
Tomotaka Tsuchimura
Keyword(s):  
Diffusion Control ◽  
Acid Diffusion ◽  
Euv Lithography

Suppression of Acid Diffusion in Chemical Amplification Resists by Molecular Control of Base Matrix Polymers

1995 ◽  
Vol 34 (Part 1, No. 12B) ◽  
pp. 6786-6793 ◽  
Author(s):  
Toshiyuki Yoshimura ◽  
Hiroshi Shiraishi ◽  
Shinji Okazaki
Keyword(s):  
Molecular Control ◽  
Chemical Amplification ◽  
Acid Diffusion ◽  
Base Matrix

Acid diffusion control in chemically amplified resists

Polymer ◽  
1999 ◽  
Vol 40 (4) ◽  
pp. 1087-1089 ◽  
Author(s):  
Jin-Baek Kim ◽  
Jae-Hak Choi ◽  
Young-Gil Kwon ◽  
Min-Ho Jung ◽  
Kyeong-Ho Chang
Keyword(s):  
Diffusion Control ◽  
Acid Diffusion ◽  
Chemically Amplified ◽  
Chemically Amplified Resists

Determination of Acid Diffusion in Chemical Amplification Positive Deep-UV Resists

1991 ◽  
Vol 30 (Part 1, No. 11B) ◽  
pp. 3132-3137 ◽  
Author(s):  
Leo Schlegel ◽  
Takumi Ueno ◽  
Nobuaki Hayashi ◽  
Takao Iwayanagi
Keyword(s):  
Chemical Amplification ◽  
Acid Diffusion ◽  
Deep Uv
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