Enhanced Acid Diffusion Control by Using Photoacid Generator Bound Polymer Resist

2015 ◽  
Vol 15 (2) ◽  
pp. 1764-1766 ◽  
Author(s):  
Jin Hyuck Jung ◽  
Min Jeong Kim ◽  
Kyung Hwa Sohn ◽  
Ha Na Kang ◽  
Man Kyu Kang ◽  
...  
Keyword(s):  
Diffusion Control ◽  
Acid Diffusion ◽  
Photoacid Generator

The Effect of Hydrophilic Photoacid Generator on Acid Diffusion in Chemical Amplification Resists

2014 ◽  
Vol 14 (12) ◽  
pp. 9662-9664
Author(s):  
Ha Na Kang ◽  
Jin Hyuck Jung ◽  
Hyun Sang Joo ◽  
Dong Chul Seo ◽  
Haiwon Lee
Keyword(s):  
Chemical Amplification ◽  
Acid Diffusion ◽  
Photoacid Generator

Resolution and LWR improvements by acid diffusion control in EUV lithography

2009 ◽  
Author(s):  
Hideaki Tsubaki ◽  
Tooru Tsuchihashi ◽  
Tomotaka Tsuchimura
Keyword(s):  
Diffusion Control ◽  
Acid Diffusion ◽  
Euv Lithography

Acid diffusion control in chemically amplified resists

Polymer ◽  
1999 ◽  
Vol 40 (4) ◽  
pp. 1087-1089 ◽  
Author(s):  
Jin-Baek Kim ◽  
Jae-Hak Choi ◽  
Young-Gil Kwon ◽  
Min-Ho Jung ◽  
Kyeong-Ho Chang
Keyword(s):  
Diffusion Control ◽  
Acid Diffusion ◽  
Chemically Amplified ◽  
Chemically Amplified Resists

Inhibition Effects of Some Organic Compounds on Zinc Corrosion in 3.5% NaCl

2008 ◽  
Vol 59 (5) ◽  
Author(s):  
Viorel Branzoi ◽  
Alina Pruna ◽  
Florina Branzoi
Keyword(s):  
Organic Compounds ◽  
Electrochemical Impedance ◽  
Corrosion Process ◽  
Diffusion Control ◽  
Cathodic Reaction ◽  
Zinc Electrode ◽  
Electrochemical Studies ◽  
Nacl Solution ◽  
Sodium Dodecylsulphate ◽  
Zinc Corrosion

The inhibition of zinc corrosion in 3.5% NaCl solution by some organic compounds (sodium dodecylsulphate (SDS), sodium dodecylbenzosulphonate (SDBS) and sodium 1,4-bis(2-etylhexyl) sulphosuccinate (AOT)) was investigated. The inhibition efficiencies were determined by polarization measurements of the zinc electrode in the solution. Electrochemical impedance spectroscopy (EIS) was also used for electrochemical studies of zinc electrode in this medium. The results showed that the used surfactants inhibit the cathodic reaction of hydrogen evolution and at low anodic overvoltage the corrosion process is under activation control, while at high anodic overvoltage the process is under diffusion control.

scholarly journals Onium Salt Type Photoacid Generator Containing Tetrakis(pentafluorophenyl)borate.

2000 ◽  
Vol 13 (5) ◽  
pp. 711-714 ◽  
Author(s):  
Jong Soo Lee ◽  
Nobukazu Miyagawa ◽  
Shigeru Takahara ◽  
Tsuguo Yamaoka
Keyword(s):  
Onium Salt ◽  
Photoacid Generator

The improved photosensitivity of photosensitive polyimides containing o ‐ nitrobenzyl ether groups induced by the addition of photoacid generator

2021 ◽  
Vol 59 (4) ◽  
pp. 340-352
Author(s):  
Gwang‐Sik Song ◽  
Youn‐Jung Heo ◽  
Jeong Ju Baek ◽  
Hyosun Lee ◽  
Geun Yeol Bae ◽  
...  
Keyword(s):  
Photoacid Generator

ChemInform Abstract: In the Blind Spot of Diffusion Control: 2-Fluoroallyl Cations and Their Various Possibilities for Stabilization.

ChemInform ◽  
2010 ◽  
Vol 22 (37) ◽  
pp. no-no
Author(s):  
Y. BESSIERE ◽  
Y. BESSARD ◽  
T. KOTANI ◽  
M. SCHLOSSER
Keyword(s):  
Blind Spot ◽  
Diffusion Control

Characterizing acid diffusion lengths in chemically amplified resists from measurements of deprotection kinetics

2014 ◽  
Vol 13 (4) ◽  
pp. 043017 ◽  
Author(s):  
Abhijit A. Patil ◽  
Yogendra Narayan Pandey ◽  
Manolis Doxastakis ◽  
Gila E. Stein
Keyword(s):  
Acid Diffusion ◽  
Chemically Amplified ◽  
Chemically Amplified Resists
Sign in / Sign up

Export Citation Format

Share Document