High contact angle embedded barrier layer materials for next-generation 193 immersion lithography

2021 ◽  
Author(s):  
Joshua A. Kaitz ◽  
Mingqi Li ◽  
Ryan Lee ◽  
Amy Kwok ◽  
Thomas Cardolaccia ◽  
...  
Keyword(s):  
Contact Angle ◽  
Barrier Layer ◽  
Next Generation ◽  
Immersion Lithography ◽  
High Contact Angle

High contact angle fluorosulfonamide-based materials for immersion lithography

2010 ◽  
Author(s):  
Daniel P. Sanders ◽  
Linda K. Sundberg ◽  
Masaki Fujiwara ◽  
Yoshiharu Terui ◽  
Manabu Yasumoto
Keyword(s):  
Contact Angle ◽  
Immersion Lithography ◽  
High Contact Angle

scholarly journals High Refractive Index Fluid for Next Generation ArF Immersion Lithography

2006 ◽  
Vol 19 (5) ◽  
pp. 641-646 ◽  
Author(s):  
Taiichi Furukawa ◽  
Katsuhiko Hieda ◽  
Yong Wang ◽  
Takashi Miyamatsu ◽  
Kinji Yamada ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Next Generation ◽  
Immersion Lithography

Next-generation ArF Laser technologies for multiple-patterning immersion lithography supporting leading edge processes

2018 ◽  
Author(s):  
Hirotaka Miyamoto ◽  
Hiroshi Furusato ◽  
Keisuke Ishida ◽  
Hiroaki Tsushima ◽  
Akihiko Kurosu ◽  
...  
Keyword(s):  
Leading Edge ◽  
Next Generation ◽  
Immersion Lithography ◽  
Laser Technologies ◽  
Arf Laser

High refractive index materials design for the next generation ArF immersion lithography

2008 ◽  
Author(s):  
Taiichi Furukawa ◽  
Takanori Kishida ◽  
Kyouyuu Yasuda ◽  
Tsutomu Shimokawa ◽  
Zhi Liu ◽  
...  
Keyword(s):  
Refractive Index ◽  
Materials Design ◽  
High Refractive Index ◽  
Next Generation ◽  
Immersion Lithography

Special Wetting Behaviors on Canna Leaf and its Dependence with Microstructures

2013 ◽  
Vol 779-780 ◽  
pp. 64-67
Author(s):  
Xiao Hua Yang ◽  
Jian Hua Xiao ◽  
Jun Fei Ou
Keyword(s):  
Contact Angle ◽  
Contact Angle Hysteresis ◽  
Lotus Leaf ◽  
Micro Scale ◽  
High Adhesion ◽  
Rose Petal ◽  
High Contact Angle ◽  
Wetting Behaviors ◽  
The Rose ◽  
Rose Petal Effect

Like lotus leaf and rose petal, the canna leaf also has excellent super hydrophobicity.The purpose of this paper is to systematically study the super hydrophilicity of canna leaf. Using SEM to observe the morphology of the canna leaf, and analytical balance to measure the adhensive force between water droplet and the leaf . This paper shows that the first type of the canna leaf which has co-exsitence of the nanocrumb and micro-scale convex cells has the high contact angle and low contact angle hysteresis similar to lotus leaf. The another type on the leaf has high contact angle but high adhesion in a certain extent like the rose petal effect, whose microstructure unitarily simple has the micro convex cells, do not distributed anything of nanoscale.

Friction on snow and ice

1953 ◽  
Vol 217 (1131) ◽  
pp. 462-478 ◽  
Keyword(s):  
Experimental Study ◽  
Contact Angle ◽  
Frictional Heating ◽  
Static Friction ◽  
Synthetic Polymers ◽  
Low Friction ◽  
Sliding Speed ◽  
High Contact Angle ◽  
Relative Hardness ◽  
Snow And Ice

An experimental study has been made of the friction of real ski and of smaller models sliding on snow and ice at various temperatures. On cold snow the static friction is high. When the sliding speed is appreciable the friction falls to a low value, and experiments support the view, put forward earlier, that this low friction is due to a localized surface melting produced by frictional heating. Measurements are made on a variety of surfaces including metals, synthetic polymers and waxes. The contact angle which water makes with the surface is important, and there is evidence that this can decrease during sliding. In general, the solids with a high contact angle give a lower friction. The behaviour is also influenced by the relative hardness of ice and of the ski surface at the temperature of sliding. Polytetrafluoroethylene gives a very low friction on snow and ice under all conditions.

CELL CULTURES ON A SUPER WATER-REPELLENT ALKYLKETENE DIMER SURFACE

2006 ◽  
Vol 05 (06) ◽  
pp. 871-876
Author(s):  
HU YAN ◽  
HATSUKI SHIGA ◽  
ETSURO ITO ◽  
KAORU TSUJII
Keyword(s):  
Contact Angle ◽  
Morphological Change ◽  
Cell Cultures ◽  
Experimental Results ◽  
Water Repellent ◽  
Biological Cells ◽  
Special Surface ◽  
Astrocyte Differentiation ◽  
High Contact Angle

The fractal alkylketene dimer (AKD) surface is an artificial super water-repellent one with a high contact angle of 174°, therefore, may provide special surface circumstances for studies of biological cells such as cell cultures. The experimental results indicated that the distribution of F-actin in the astrocytes cultured on the fractal AKD-coated dishes showed the stellate shape, while that in the astrocytes cultured on the poly-L-lysine-coated coverslips showed the formation of long alignment. The morphological change of astrocytes is induced by the fractal AKD surface, and the result suggests that astrocyte differentiation is stimulated by the fractal AKD surface.

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