High contact angle fluorosulfonamide-based materials for immersion lithography
2007 ◽
Vol 447
(4-6)
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pp. 379-383
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1953 ◽
Vol 217
(1131)
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pp. 462-478
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Keyword(s):
2006 ◽
Vol 5
(2)
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pp. 023002
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2019 ◽
Vol 4
(5)
◽
pp. 23-27
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