Electron cyclotron resonance radio-frequency hybrid plasma-deposited diamond-like carbon as an optical material

Mapping Intimacies ◽

10.1117/12.22464 ◽

1990 ◽

Author(s):

Sri S. Sritharan ◽

John S. Wilson ◽

Pierre R. Barbier ◽

Jacques I. Pankove

Keyword(s):

Radio Frequency ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Optical Material ◽

Diamond Like Carbon ◽

Hybrid Plasma

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Effects of radio-frequency bias on silicon oxide films deposited by dual electron cyclotron resonance-radio frequency hybrid plasma

Acta Physica Sinica ◽

10.7498/aps.59.1338 ◽

2010 ◽

Vol 59 (2) ◽

pp. 1338

Author(s):

Ke Bo ◽

Wang Lei ◽

Ni Tian-Ling ◽

Ding Fang ◽

Chen Mu-Di ◽

...

Keyword(s):

Radio Frequency ◽

Cyclotron Resonance ◽

Silicon Oxide ◽

Electron Cyclotron Resonance ◽

Oxide Films ◽

Electron Cyclotron ◽

Hybrid Plasma

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Role of bias frequency in a dual electron cyclotron resonance-radio-frequency hybrid plasma

Vacuum ◽

10.1016/j.vacuum.2009.07.009 ◽

2009 ◽

Vol 84 (2) ◽

pp. 348-351 ◽

Cited By ~ 3

Author(s):

L. Wang ◽

B. Ke ◽

T.L. Ni ◽

F. Ding ◽

M.D. Chen ◽

...

Keyword(s):

Radio Frequency ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Hybrid Plasma

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Plasma characterization of an electron cyclotron resonance–radio‐frequency hybrid plasma reactor

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.575818 ◽

1989 ◽

Vol 7 (3) ◽

pp. 903-907 ◽

Cited By ~ 33

Author(s):

Young H. Lee ◽

John E. Heidenreich ◽

Guadalupe Fortuno

Keyword(s):

Radio Frequency ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Reactor ◽

Electron Cyclotron ◽

Hybrid Plasma ◽

Plasma Characterization

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The effect of radio frequency substrate biasing in the deposition of diamond‐like carbon films in an electron cyclotron resonance discharge

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577589 ◽

1991 ◽

Vol 9 (3) ◽

pp. 1129-1133 ◽

Cited By ~ 22

Author(s):

P. W. Pastel ◽

W. J. Varhue

Keyword(s):

Radio Frequency ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon

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Integrated characterization study of diamond like carbon (DLC) synthesized by 2.45 GHZ microwave electron cyclotron resonance (ECR) plasma CVD

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2017.08.017 ◽

2017 ◽

Vol 328 ◽

pp. 30-43 ◽

Cited By ~ 5

Author(s):

R.M. Dey ◽

D. Patil ◽

S. Kulkarni

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Plasma Cvd ◽

Ecr Plasma ◽

Characterization Study

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Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N2: Neutral kinetic energies and source gas cracking

Journal of Applied Physics ◽

10.1063/1.366916 ◽

1998 ◽

Vol 83 (4) ◽

pp. 1917-1923 ◽

Cited By ~ 6

Author(s):

N. Materer ◽

Rory S. Goodman ◽

Stephen R. Leone

Keyword(s):

Radio Frequency ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Mass spectrometric investigations on plasmas obtained from a dual electron cyclotron resonance-radio frequency discharge

Plasma Sources Science and Technology ◽

10.1088/0963-0252/7/4/018 ◽

1998 ◽

Vol 7 (4) ◽

pp. 607-616 ◽

Cited By ~ 28

Author(s):

M Zarrabian ◽

C Leteinturier ◽

G Turban

Keyword(s):

Radio Frequency ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Mass Spectrometric ◽

Electron Cyclotron ◽

Radio Frequency Discharge

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Modeling and analysis of the electron cyclotron resonance diamond-like carbon deposition process

Journal of Applied Physics ◽

10.1063/1.1425446 ◽

2002 ◽

Vol 91 (3) ◽

pp. 1634-1639 ◽

Cited By ~ 12

Author(s):

S. F. Yoon ◽

K. H. Tan ◽

Rusli ◽

J. Ahn

Keyword(s):

Cyclotron Resonance ◽

Carbon Deposition ◽

Electron Cyclotron Resonance ◽

Deposition Process ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Modeling And Analysis

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Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.l802 ◽

1993 ◽

Vol 32 (Part 2, No. 6A) ◽

pp. L802-L805 ◽

Cited By ~ 3

Author(s):

Akira Ishii ◽

Yoshiyuki Sakaguchi ◽

Shoichiro Minomo ◽

Michio Taniguchi ◽

Masato Sugiyo ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Diamond Like Carbon Film ◽

Resonance Plasma

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Pulse‐time‐modulated electron cyclotron resonance plasma etching with low radio‐frequency substrate bias

Applied Physics Letters ◽

10.1063/1.116071 ◽

1996 ◽

Vol 68 (3) ◽

pp. 316-318 ◽

Cited By ~ 41

Author(s):

Seiji Samukawa

Keyword(s):

Radio Frequency ◽

Plasma Etching ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Substrate Bias ◽

Pulse Time ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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