scholarly journals Effects of radio-frequency bias on silicon oxide films deposited by dual electron cyclotron resonance-radio frequency hybrid plasma

2010 ◽  
Vol 59 (2) ◽  
pp. 1338
Author(s):  
Ke Bo ◽  
Wang Lei ◽  
Ni Tian-Ling ◽  
Ding Fang ◽  
Chen Mu-Di ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Cyclotron Resonance ◽  
Silicon Oxide ◽  
Electron Cyclotron Resonance ◽  
Oxide Films ◽  
Electron Cyclotron ◽  
Hybrid Plasma

Role of bias frequency in a dual electron cyclotron resonance-radio-frequency hybrid plasma

Vacuum ◽  
2009 ◽  
Vol 84 (2) ◽  
pp. 348-351 ◽  
Author(s):  
L. Wang ◽  
B. Ke ◽  
T.L. Ni ◽  
F. Ding ◽  
M.D. Chen ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Hybrid Plasma
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