On-chip optical nano-scale displacement sensor

2013 ◽  
Author(s):  
Peng Wang ◽  
Aron Michael ◽  
Chee Yee Kwok
2014 ◽  
Vol 6 (9) ◽  
pp. 856-860
Author(s):  
Xiao Fei Kuang ◽  
Chenxu Guo ◽  
Yuhua Cheng ◽  
Hengyi Wang

Author(s):  
Robert K. Messenger ◽  
Timothy W. McLain ◽  
Larry L. Howell

Utilizing the piezoresistive properties of polysilicon as an on-chip sensing mechanism facilitates the implementation of feedback control on surface-micromachined MEMS devices. We have performed nanopositioning resolution tests on a MEMS thermal actuator, both open and closed loop, to demonstrate the performance improvements possible with feedback control. A thermomechanical in-plane microactuator (TIM), fabricated using the MUMPS fabrication process, was used in this study. The actuator was coupled to a piezoresistive displacement sensor (PRDS) that was fabricated as part of the same process. Measurements of the actuator output, taken using a scanning electron microscope, show that nanopositioning repeatability improved from ±59 nm to ±31 nm when feedback control is employed.


2020 ◽  
Vol 11 (1) ◽  
Author(s):  
Tianran Liu ◽  
Francesco Pagliano ◽  
René van Veldhoven ◽  
Vadim Pogoretskiy ◽  
Yuqing Jiao ◽  
...  

Abstract Optical read-out of motion is widely used in sensing applications. Recent developments in micro- and nano-optomechanical systems have given rise to on-chip mechanical sensing platforms, potentially leading to compact and integrated optical motion sensors. However, these systems typically exploit narrow spectral resonances and therefore require tuneable lasers with narrow linewidth and low spectral noise, which makes the integration of the read-out extremely challenging. Here, we report a step towards the practical application of nanomechanical sensors, by presenting a sensor with ultrawide (∼80 nm) optical bandwidth. It is based on a nanomechanical, three-dimensional directional coupler with integrated dual-channel waveguide photodiodes, and displays small displacement imprecision of only 45 fm/Hz1/2 as well as large dynamic range (>30 nm). The broad optical bandwidth releases the need for a tuneable laser and the on-chip photocurrent read-out replaces the external detector, opening the way to fully-integrated nanomechanical sensors.


Nanophotonics ◽  
2013 ◽  
Vol 2 (2) ◽  
pp. 103-130 ◽  
Author(s):  
Stephanie Law ◽  
Viktor Podolskiy ◽  
Daniel Wasserman

AbstractSurface plasmon polaritons and their localized counterparts, surface plasmons, are widely used at visible and near-infrared (near-IR) frequencies to confine, enhance, and manipulate light on the subwavelength scale. At these frequencies, surface plasmons serve as enabling mechanisms for future on-chip communications architectures, high-performance sensors, and high-resolution imaging and lithography systems. Successful implementation of plasmonics-inspired solutions at longer wavelengths, in the mid-infrared (mid-IR) frequency range, would benefit a number of highly important technologies in health- and defense-related fields that include trace-gas detection, heat-signature sensing, mimicking, and cloaking, and source and detector development. However, the body of knowledge of visible/near-IR frequency plasmonics cannot be easily transferred to the mid-IR due to the fundamentally different material response of metals in these two frequency ranges. Therefore, mid-IR plasmonic architectures for subwavelength light manipulation require both new materials and new geometries. In this work we attempt to provide a comprehensive review of recent approaches to realize nano-scale plasmonic devices and structures operating at mid-IR wavelengths. We first discuss the motivation for the development of the field of mid-IR plasmonics and the fundamental differences between plasmonics in the mid-IR and at shorter wavelengths. We then discuss early plasmonics work in the mid-IR using traditional plasmonic metals, illuminating both the impressive results of this work, as well as the challenges arising from the very different behavior of metals in the mid-IR, when compared to shorter wavelengths. Finally, we discuss the potential of new classes of mid-IR plasmonic materials, capable of mimicking the behavior of traditional metals at shorter wavelengths, and allowing for true subwavelength, and ultimately, nano-scale confinement at long wavelengths.


Nanoscale ◽  
2015 ◽  
Vol 7 (19) ◽  
pp. 8962-8967 ◽  
Author(s):  
Lin Hu ◽  
Jin Zhao ◽  
Jinlong Yang

We propose that a nano-scale displacement sensor with high resolution in weak-force systems can be realized based on vertically stacked two-dimensional (2D) atomic corrugated layer materials bound through van der Waals (vdW) interactions.


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