At-wavelength characterization of an extreme ultraviolet camera from low to mid-spatial frequencies with a compact laser plasma source

1997 ◽  
Vol 15 (6) ◽  
pp. 2462 ◽  
Author(s):  
A. K. Ray-Chaudhuri
Keyword(s):  
Laser Plasma ◽  
Extreme Ultraviolet ◽  
Plasma Source ◽  
Spatial Frequencies

Extreme Ultraviolet Spectroscopy of a Laser Plasma Source for Lithography

1998 ◽  
Vol 57 (2) ◽  
pp. 276-282 ◽  
Author(s):  
A P Shevelko ◽  
L A Shmaenok ◽  
S S Churilov ◽  
R K F J Bastiaensen ◽  
F Bijkerk
Keyword(s):  
Laser Plasma ◽  
Extreme Ultraviolet ◽  
Plasma Source ◽  
Ultraviolet Spectroscopy

Spatial and spectral characterization of a laser produced plasma source for extreme ultraviolet metrology

2004 ◽  
Vol 75 (11) ◽  
pp. 4981-4988 ◽  
Author(s):  
H. Legall ◽  
H. Stiel ◽  
U. Vogt ◽  
H. Schönnagel ◽  
P.-V. Nickles ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Plasma Source ◽  
Spectral Characterization ◽  
Laser Produced Plasma

scholarly journals A Few MeV Laser-Plasma Accelerated Proton Beam in Air Collimated Using Compact Permanent Quadrupole Magnets

2021 ◽  
Vol 11 (14) ◽  
pp. 6358
Author(s):  
Fernando Brandi ◽  
Luca Labate ◽  
Daniele Palla ◽  
Sanjeev Kumar ◽  
Lorenzo Fulgentini ◽  
...  
Keyword(s):  
Proton Beam ◽  
Laser Plasma ◽  
Cost Effective ◽  
Plasma Source ◽  
X Ray ◽  
Practical Applications ◽  
Beam Transport Line ◽  
Transport Line ◽  
Mev Protons

Proton laser-plasma-based acceleration has nowadays achieved a substantial maturity allowing to seek for possible practical applications, as for example Particle Induced X-ray Emission with few MeV protons. Here we report about the design, implementation, and characterization of a few MeV laser-plasma-accelerated proton beamline in air using a compact and cost-effective beam transport line based on permanent quadrupole magnets. The magnetic beamline coupled with a laser-plasma source based on a 14-TW laser results in a well-collimated proton beam of about 10 mm in diameter propagating in air over a few cm distance.

scholarly journals Эмиссионные свойства лазерной плазмы при ее возбуждении на молекулярно-кластерных струях углекислоты

2019 ◽  
Vol 89 (11) ◽  
pp. 1656
Author(s):  
А.Н. Нечай ◽  
А.А. Перекалов ◽  
Н.И. Чхало ◽  
Н.Н. Салащенко
Keyword(s):  
Ultraviolet Radiation ◽  
Laser Plasma ◽  
Radiation Source ◽  
Extreme Ultraviolet ◽  
Supersonic Nozzle ◽  
Plasma Source ◽  
Molecular Cluster ◽  
Gas Jet ◽  
Euv Emission ◽  
Extreme Ultraviolet Radiation

The paper presents the results of studies of a gas-jet laser-plasma source of extreme ultraviolet radiation (EUV) based on a conical supersonic nozzle. Molecular cluster CO2 jets were used as targets. By changing the parameters of the gas at the nozzle entrance, various modes of gas outflow were obtained, the influence of these modes on the emission and technical characteristics of the radiation source was studied. An experimentally shown is an increase in EUV emission with an increase in the amount of clustered matter in the jet. A possible relationship was observed between the increase in the intensity of EUV radiation with an increase in the number of clustered matter in the jet.

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