Spatial and spectral characterization of a laser produced plasma source for extreme ultraviolet metrology

2004 ◽  
Vol 75 (11) ◽  
pp. 4981-4988 ◽  
Author(s):  
H. Legall ◽  
H. Stiel ◽  
U. Vogt ◽  
H. Schönnagel ◽  
P.-V. Nickles ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Plasma Source ◽  
Spectral Characterization ◽  
Laser Produced Plasma

Tin laser-produced plasma source modeling at 13.5nm for extreme ultraviolet lithography

2008 ◽  
Vol 92 (15) ◽  
pp. 151501 ◽  
Author(s):  
J. White ◽  
G. O’Sullivan ◽  
S. Zakharov ◽  
P. Choi ◽  
V. Zakharov ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Plasma Source ◽  
Extreme Ultraviolet Lithography ◽  
Source Modeling ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

Characterization of a laser-produced plasma source for a laboratory EUV reflectometer

2003 ◽  
Author(s):  
Frank Scholze ◽  
Frank Scholz ◽  
Johannes Tuemmler ◽  
Gerhard Ulm ◽  
Herbert Legall ◽  
...  
Keyword(s):  
Plasma Source ◽  
Laser Produced Plasma
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