Advances in microscopic imaging at the nanoscale using soft X-rays and extreme ultraviolet (EUV) from a compact laser plasma source

2019 ◽  
Author(s):  
Przemyslaw Wachulak ◽  
Andrzej Bartnik ◽  
Henryk Fiedorowicz
Keyword(s):  
Laser Plasma ◽  
Extreme Ultraviolet ◽  
Plasma Source ◽  
X Rays ◽  
Microscopic Imaging

Nanoscale Imaging Using a Compact Laser Plasma Source of Soft X-Rays and Extreme Ultraviolet (EUV)

2018 ◽  
pp. 251-260 ◽  
Author(s):  
P. Wachulak ◽  
A. Torrisi ◽  
M. Ayele ◽  
J. Czwartos ◽  
A. Bartnik ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Extreme Ultraviolet ◽  
Plasma Source ◽  
X Rays ◽  
Nanoscale Imaging

Imaging With Soft X-Rays Relayed By A Toroidal Mirror From A Laser-Plasma Source

1988 ◽  
Author(s):  
C . P. Hills ◽  
R. J. Rosser ◽  
A. D. Stead ◽  
T. W. Ford
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
X Rays

Laser plasma sources of soft x-rays and extreme ultraviolet (EUV) for technology, biomedical, and metrology applications

2008 ◽  
Author(s):  
Andrzej Bartnik ◽  
Henryk Fiedorowicz ◽  
Roman Jarocki ◽  
Jerzy Kostecki ◽  
Rafał Rakowski ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Extreme Ultraviolet ◽  
X Rays ◽  
Plasma Sources

Investigation of a laser-plasma source of soft x rays operating at laser power densities 5×1011–2×1014W/cm2

1982 ◽  
Vol 12 (8) ◽  
pp. 977-980 ◽  
Author(s):  
N G Basov ◽  
Yu A Bykovskiĭ ◽  
Aleksandr V Vinogradov ◽  
A A Galichiĭ ◽  
M P Kalashnikov ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Laser Power ◽  
Plasma Source ◽  
X Rays ◽  
Power Densities

Extreme Ultraviolet Spectroscopy of a Laser Plasma Source for Lithography

1998 ◽  
Vol 57 (2) ◽  
pp. 276-282 ◽  
Author(s):  
A P Shevelko ◽  
L A Shmaenok ◽  
S S Churilov ◽  
R K F J Bastiaensen ◽  
F Bijkerk
Keyword(s):  
Laser Plasma ◽  
Extreme Ultraviolet ◽  
Plasma Source ◽  
Ultraviolet Spectroscopy
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