High aspect ratio aligned multilayer microstructure fabrication

K. Y. Lee

doi:10.1116/1.587525

High aspect ratio aligned multilayer microstructure fabrication

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.587525 ◽

1994 ◽

Vol 12 (6) ◽

pp. 3425 ◽

Cited By ~ 16

Author(s):

K. Y. Lee

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Microstructure Fabrication

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New hybrid (e‐beam/x‐ray) exposure technique for high aspect ratio microstructure fabrication

Journal of Vacuum Science and Technology ◽

10.1116/1.570259 ◽

1979 ◽

Vol 16 (6) ◽

pp. 1631-1634 ◽

Cited By ~ 14

Author(s):

M. Hatzakis ◽

D. Hofer ◽

T. H. P. Chang

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

X Ray ◽

Microstructure Fabrication ◽

High Aspect Ratio Microstructure ◽

Exposure Technique

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Nickel electrodeposition studies for high-aspect-ratio microstructure fabrication for MEMS

10.1117/12.659104 ◽

2006 ◽

Author(s):

Tinghui Xin ◽

Pratul K. Ajmera

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Nickel Electrodeposition ◽

Microstructure Fabrication ◽

High Aspect Ratio Microstructure

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Graphite membrane applied for high-aspect-ratio microstructure fabrication

10.1117/12.392053 ◽

2000 ◽

Author(s):

Hsiharng Yang ◽

Min-Chieh Chou ◽

Horng-Jey Wang ◽

Chengtang Pan ◽

Jiang Long Lin

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Microstructure Fabrication ◽

High Aspect Ratio Microstructure

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High-aspect-ratio microstructure fabrication using SU-8 resist

10.1117/12.396472 ◽

2000 ◽

Cited By ~ 2

Author(s):

Jun Zhu ◽

Xiaolin Zhao ◽

Zhiping Ni

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Microstructure Fabrication ◽

High Aspect Ratio Microstructure

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FORMATION OF THICK HIGH-ASPECT-RATIO RESISTIVE MASKS BY THE CONTACT PHOTOLITHOGRAPHY METHOD

Автометрия ◽

10.15372/aut20180202 ◽

2018 ◽

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio

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Low and heat transfer in a high-aspect-ratio rib-roughed cooling channel with longitudinal intersecting ribs

Прикладная механика и техническая физика ◽

10.15372/pmtf20180414 ◽

2018 ◽

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

High Aspect Ratio ◽

Cooling Channel

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HEAT TRANSFER IN A FLAT CHANNEL WITH HIGH ASPECT RATIO AT A HEAT CARRIER FLOW WITH LOW-PRANDTL NUMBER

10.1615/ihtc16.cov.022710 ◽

2018 ◽

Author(s):

Viktor S. Naumkin ◽

O.V. Vitovsky ◽

Maksim S. Makarov ◽

V. E. Nakoryakov

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

Prandtl Number ◽

Heat Carrier ◽

High Aspect Ratio ◽

Flat Channel ◽

Carrier Flow

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HEAT TRANSFER AND PRESSURE LOSS PERFORMANCE FOR FAMILIES OF PARTIAL LENGTH PIN FIN ARRAYS IN HIGH ASPECT RATIO RECTANGULAR DUCTS

Proceeding of International Heat Transfer Conference 8 ◽

10.1615/ihtc8.1470 ◽

1986 ◽

Cited By ~ 4

Author(s):

G. D. Steuber ◽

D. E. Metzger

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

High Aspect Ratio ◽

Pressure Loss ◽

Pin Fin ◽

Partial Length ◽

Pin Fin Arrays

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High quality and high aspect ratio processing of multilayer structures with dissimilar material properties by UV laser microjet

International Congress on Applications of Lasers & Electro-Optics ◽

10.2351/1.5118615 ◽

2016 ◽

Author(s):

Jérémie Diboine ◽

Pierre Leroux ◽

Helgi Diehl ◽

Bernold Richerzhagen

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Material Properties ◽

Dissimilar Material ◽

Multilayer Structures ◽

Uv Laser ◽

High Quality

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Experimental and theoretical study of gust response for high-aspect-ratio wing

AIAA Journal ◽

10.2514/3.15078 ◽

2002 ◽

Vol 40 ◽

pp. 419-429 ◽

Cited By ~ 2

Author(s):

D. Tang ◽

E. H. Dowell

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Theoretical Study ◽

Gust Response

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