Graphite membrane applied for high-aspect-ratio microstructure fabrication
1979 ◽
Vol 16
(6)
◽
pp. 1631-1634
◽
2004 ◽
Vol 10
(6-7)
◽
pp. 571-577
◽
2004 ◽
Vol 10
(4)
◽
pp. 265-268
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