High-aspect-ratio microstructure fabrication using SU-8 resist

2000 ◽  
Author(s):  
Jun Zhu ◽  
Xiaolin Zhao ◽  
Zhiping Ni
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Microstructure Fabrication ◽  
High Aspect Ratio Microstructure

Graphite membrane applied for high-aspect-ratio microstructure fabrication

2000 ◽  
Author(s):  
Hsiharng Yang ◽  
Min-Chieh Chou ◽  
Horng-Jey Wang ◽  
Chengtang Pan ◽  
Jiang Long Lin
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Microstructure Fabrication ◽  
High Aspect Ratio Microstructure

Development of the Soaking Method for Manufacturing Polymer Electrolyte Fuel Cells with a High-Aspect-Ratio Microstructure

2021 ◽  
Vol MA2021-02 (38) ◽  
pp. 1135-1135
Author(s):  
Akihisa Tanaka ◽  
Keisuke Nagato ◽  
Morio Tomizawa ◽  
Kohei Nagai ◽  
Masayuki Nakao
Keyword(s):  
Fuel Cells ◽  
Aspect Ratio ◽  
Polymer Electrolyte ◽  
High Aspect Ratio ◽  
Polymer Electrolyte Fuel Cells ◽  
High Aspect Ratio Microstructure

Process research of high aspect ratio microstructure using SU-8 resist

2004 ◽  
Vol 10 (4) ◽  
pp. 265-268 ◽  
Author(s):  
J. Liu ◽  
B. Cai ◽  
J. Zhu ◽  
G. Ding ◽  
X. Zhao ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Process Research ◽  
High Aspect Ratio Microstructure
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