Monte Carlo-fluid model of chlorine atom production in Cl2, HCl, and CCl4 radio-frequency discharges for plasma etching

1992 ◽  
Vol 10 (5) ◽  
pp. 2179 ◽  
Author(s):  
Timothy J. Sommerer
Keyword(s):  
Monte Carlo ◽  
Radio Frequency ◽  
Chlorine Atom ◽  
Plasma Etching ◽  
Fluid Model ◽  
Radio Frequency Discharges

A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments

1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Self Consistent ◽  
Radio Frequency Discharges

Monte Carlo‐fluid hybrid model of the accumulation of dust particles at sheath edges in radio‐frequency discharges

1991 ◽  
Vol 59 (6) ◽  
pp. 638-640 ◽  
Author(s):  
Timothy J. Sommerer ◽  
Michael S. Barnes ◽  
John H. Keller ◽  
Michael J. McCaughey ◽  
Mark J. Kushner
Keyword(s):  
Monte Carlo ◽  
Radio Frequency ◽  
Hybrid Model ◽  
Dust Particles ◽  
Radio Frequency Discharges
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