A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments
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1992 ◽
Vol 10
(5)
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pp. 2179
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2009 ◽
Vol 76
(3-4)
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pp. 305-315
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1963 ◽
Vol 19
(8)
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pp. 1309-1317
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