Diagnostics and decomposition mechanism in radio-frequency discharges of fluorocarbons utilized for plasma etching or polymerization

1982 ◽  
Vol 2 (3) ◽  
pp. 213-231 ◽  
Author(s):  
R. d'Agostino ◽  
F. Cramarossa ◽  
S. De Benedictis
Keyword(s):  
Radio Frequency ◽  
Plasma Etching ◽  
Decomposition Mechanism ◽  
Radio Frequency Discharges

A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments

1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Self Consistent ◽  
Radio Frequency Discharges

Excitation in radio-frequency discharges

1963 ◽  
Vol 19 (8) ◽  
pp. 1309-1317 ◽  
Author(s):  
R. Mavrodineanu ◽  
R.C. Hughes
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharges

Modeling of electronegative radio-frequency discharges

1991 ◽  
Vol 19 (2) ◽  
pp. 122-129 ◽  
Author(s):  
M. Meyyappan ◽  
T.R. Govindan
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharges

scholarly journals Heavy-particle induced secondary electrons in capacitive radio frequency discharges driven by tailored voltage waveforms

2019 ◽  
Vol 126 (4) ◽  
pp. 043303 ◽  
Author(s):  
A. Derzsi ◽  
B. Horváth ◽  
I. Korolov ◽  
Z. Donkó ◽  
J. Schulze
Keyword(s):  
Radio Frequency ◽  
Heavy Particle ◽  
Secondary Electrons ◽  
Radio Frequency Discharges
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