Monte Carlo‐fluid hybrid model of the accumulation of dust particles at sheath edges in radio‐frequency discharges
Keyword(s):
1994 ◽
Vol 3
(2)
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pp. 190-205
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Keyword(s):
2003 ◽
Vol 8
(1)
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pp. 47
1992 ◽
Vol 10
(5)
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pp. 2179
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Keyword(s):
2008 ◽
Vol 128
(4)
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pp. 656-664
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Keyword(s):
1963 ◽
Vol 19
(8)
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pp. 1309-1317
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