A high-speed, high-precision electron beam lithography system (electron optics)

1985 ◽  
Vol 3 (1) ◽  
pp. 98 ◽  
Author(s):  
N. Saitou
Keyword(s):  
Electron Beam ◽  
High Precision ◽  
Electron Beam Lithography ◽  
High Speed ◽  
Electron Optics ◽  
Lithography System

A High Speed Nanometric Electron Beam Lithography System

1987 ◽  
Author(s):  
T. Matsuzaka ◽  
N. Saitou ◽  
M. Okumura ◽  
G. Matsuoka ◽  
M. Ohyama
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
High Speed ◽  
Lithography System
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