A High Speed Nanometric Electron Beam Lithography System

Mapping Intimacies ◽

10.1117/12.940376 ◽

1987 ◽

Author(s):

T. Matsuzaka ◽

N. Saitou ◽

M. Okumura ◽

G. Matsuoka ◽

M. Ohyama

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

High Speed ◽

Lithography System

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A high-speed patterning controller for the EB60 electron beam lithography system

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.583929 ◽

1987 ◽

Vol 5 (1) ◽

pp. 66 ◽

Cited By ~ 1

Author(s):

Tetsuo Morosawa

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

High Speed ◽

Lithography System

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High speed flat guide ceramic stage for electron-beam lithography system

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.583313 ◽

1986 ◽

Vol 4 (1) ◽

pp. 280 ◽

Cited By ~ 5

Author(s):

Haruo Tsuyuzaki

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

High Speed ◽

Lithography System

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A high speed, high precision electron beam lithography system (system design)

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.583299 ◽

1985 ◽

Vol 3 (1) ◽

pp. 94 ◽

Cited By ~ 3

Author(s):

K. Nakamura

Keyword(s):

Electron Beam ◽

System Design ◽

High Precision ◽

Electron Beam Lithography ◽

High Speed ◽

Lithography System

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A high-speed, high-precision electron beam lithography system (electron optics)

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.583300 ◽

1985 ◽

Vol 3 (1) ◽

pp. 98 ◽

Cited By ~ 3

Author(s):

N. Saitou

Keyword(s):

Electron Beam ◽

High Precision ◽

Electron Beam Lithography ◽

High Speed ◽

Electron Optics ◽

Lithography System

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Cell projection column for high speed electron-beam lithography system

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586005 ◽

1992 ◽

Vol 10 (6) ◽

pp. 2799 ◽

Cited By ~ 3

Author(s):

H. Itoh

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

High Speed ◽

Lithography System

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6196. A high-speed, high-precision electron beam lithography system (electron optics)

Vacuum ◽

10.1016/0042-207x(86)90463-x ◽

1986 ◽

Vol 36 (10) ◽

pp. 736

Keyword(s):

Electron Beam ◽

High Precision ◽

Electron Beam Lithography ◽

High Speed ◽

Electron Optics ◽

Lithography System

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A novel high-speed nanometric electron beam lithography system: EB–F

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.583931 ◽

1987 ◽

Vol 5 (1) ◽

pp. 75 ◽

Cited By ~ 6

Author(s):

Kazumi Iwadate

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

High Speed ◽

Lithography System

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A high speed electron beam lithography system

Journal of Vacuum Science and Technology ◽

10.1116/1.571193 ◽

1981 ◽

Vol 19 (4) ◽

pp. 932-935 ◽

Cited By ~ 9

Author(s):

J. C. Eidson ◽

R. K. Scudder

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

High Speed ◽

Lithography System

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High-speed and high-precision deflectors applied in electron beam lithography system based on scanning electron microscopy

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1813454 ◽

2004 ◽

Vol 22 (6) ◽

pp. 3557 ◽

Cited By ~ 3

Author(s):

Zhuming Liu ◽

Wenqi Gu

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Electron Beam ◽

High Precision ◽

Electron Beam Lithography ◽

High Speed ◽

Lithography System ◽

Scanning Electron

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Line stitching in servo-assisted electron beam lithography system

2011 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) ◽

10.1109/aim.2011.6027026 ◽

2011 ◽

Author(s):

Jia-Yush Yen ◽

Lien-Sheng Chen ◽

Pablo Chiu

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

Lithography System

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