Silicon oxide selective etching process keeping harmony with environment by using radical injection technique

1999 ◽  
Vol 17 (6) ◽  
pp. 3260-3264 ◽  
Author(s):  
Kazushi Fujita ◽  
Masafumi Ito ◽  
Masaru Hori ◽  
Toshio Goto
Keyword(s):  
Silicon Oxide ◽  
Selective Etching ◽  
Etching Process ◽  
Injection Technique

Subsurface reactions of silicon nitride in a highly selective etching process of silicon oxide over silicon nitride

2002 ◽  
Vol 91 (5) ◽  
pp. 3452-3458 ◽  
Author(s):  
Masafumi Ito ◽  
Kiyoshi Kamiya ◽  
Masaru Hori ◽  
Toshio Goto
Keyword(s):  
Silicon Nitride ◽  
Silicon Oxide ◽  
Selective Etching ◽  
Etching Process

scholarly journals Selective etching of 10 MHz repetition rate fs-laser inscribed tracks in YAG

2021 ◽  
Vol 255 ◽  
pp. 10003
Author(s):  
Kore Hasse ◽  
Detlef Kip ◽  
Christian Kränkel
Keyword(s):  
Aspect Ratio ◽  
Repetition Rate ◽  
Laser System ◽  
Selective Etching ◽  
Etching Process ◽  
Acid Mixture ◽  
Laser Structuring ◽  
Order Of Magnitude ◽  
Fs Laser

We investigated fs-laser structuring of YAG crystals at high writing velocities up to 100 mm/s using a commercial 10 MHz fs-laser system supplied by Coherent Inc. and selective etching of these structures for fabrication of ultrahigh aspect ratio microchannels. Usage of a diluted acid mixture of 22% H3PO4 and 24% H2SO4 accelerated the etching process significantly to an etching parameter D of 11.2 μm2/s, which is three times higher than previously reported. Additionally, the selectivity of the etching process was increased by an order of magnitude.

Formation of Nb2O5 Hollow Architectures by Selective Etching Process

2012 ◽  
Vol 2 (4) ◽  
pp. 410-414
Author(s):  
Fei Liu ◽  
Xin Zhang ◽  
Dongfeng Xue
Keyword(s):  
Selective Etching ◽  
Etching Process

scholarly journals Introducing pinhole magnification by selective etching: application to poly-Si on ultra-thin silicon oxide films

2017 ◽  
Vol 124 ◽  
pp. 435-440 ◽  
Author(s):  
Dominic Tetzlaff ◽  
Marvin Dzinnik ◽  
Jan Krügener ◽  
Yevgeniya Larionova ◽  
Sina Reiter ◽  
...  
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Selective Etching ◽  
Thin Silicon
Sign in / Sign up

Export Citation Format

Share Document