P-13: Influence of Oxide Thinning by Selective Etching Process on Solution Processed Indium Zinc Oxide Thin Film Transistor

Jae Won Na; Hee Jun Kim; Jin Hyeok Lee; Hyun Jae Kim

doi:10.1002/sdtp.10859

P-13: Influence of Oxide Thinning by Selective Etching Process on Solution Processed Indium Zinc Oxide Thin Film Transistor

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.10859 ◽

2016 ◽

Vol 47 (1) ◽

pp. 1165-1167

Author(s):

Jae Won Na ◽

Hee Jun Kim ◽

Jin Hyeok Lee ◽

Hyun Jae Kim

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

Thin Film Transistor ◽

Selective Etching ◽

Etching Process ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Solution Processed ◽

Indium Zinc Oxide

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Solution-Processed Oxide Thin-Film Transistor with Spin-Coated Zinc Tin Oxide Active Layer and Indium Zinc Oxide Source/Drain Electrodes

ECS Meeting Abstracts ◽

10.1149/ma2010-02/29/1824 ◽

2010 ◽

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

Active Layer ◽

Tin Oxide ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

Solution Processed ◽

Indium Zinc Oxide ◽

Zinc Tin Oxide

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Effect of Spin Coating Speed on the Electrical Performances of Solution-Processed Indium Zinc Oxide Thin-Film Transistors

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2016.13679 ◽

2016 ◽

Vol 16 (12) ◽

pp. 12871-12874 ◽

Cited By ~ 2

Author(s):

Fei Shan ◽

Seung Wook Chang ◽

Jung-Hyuk Koh ◽

Sung-Jin Kim

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

Spin Coating ◽

Thin Film Transistors ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Solution Processed ◽

Indium Zinc Oxide

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Capillary-Force-Pattern Formation of Indium-Zinc-Oxide Thin-Film Transistor

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2019.15992 ◽

2019 ◽

Vol 19 (4) ◽

pp. 2179-2182

Author(s):

Hyunji Shin ◽

Dongwook Kim ◽

Jaehoon Park ◽

Seong-Ho Song ◽

Jong Sun Choi

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

Pattern Formation ◽

Capillary Force ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Indium Zinc Oxide

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Bottom-Gate Gallium Indium Zinc Oxide Thin-Film Transistor Array for High-Resolution AMOLED Display

IEEE Electron Device Letters ◽

10.1109/led.2008.2006637 ◽

2008 ◽

Vol 29 (12) ◽

pp. 1309-1311 ◽

Cited By ~ 220

Author(s):

Jang Yeon Kwon ◽

Kyoung Seok Son ◽

Ji Sim Jung ◽

Tae Sang Kim ◽

Myung Kwan Ryu ◽

...

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

High Resolution ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Indium Zinc Oxide ◽

Bottom Gate

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Effects of Pre-annealing on the Performance of Solution-processed Indium Zinc Oxide Thin-film Transistors

JSTS Journal of Semiconductor Technology and Science ◽

10.5573/jsts.2018.18.3.315 ◽

2018 ◽

Vol 18 (3) ◽

pp. 315-320

Author(s):

Fei Shan ◽

Sung-Jin Kim

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

Thin Film Transistors ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Solution Processed ◽

Indium Zinc Oxide

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Solution-processed indium-zinc-oxide thin-film transistors from a fast and stable pre-annealing process with a femtosecond laser

Journal of the Korean Physical Society ◽

10.3938/jkps.70.872 ◽

2017 ◽

Vol 70 (9) ◽

pp. 872-875

Author(s):

Fei Shan ◽

Sung-Jin Kim ◽

Yu Zhao ◽

Nam Kim ◽

Seong Gon Choi ◽

...

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

Femtosecond Laser ◽

Thin Film Transistors ◽

Annealing Process ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Solution Processed ◽

Indium Zinc Oxide

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Influence of the channel layer thickness on electrical properties of indium zinc oxide thin-film transistor

Microelectronic Engineering ◽

10.1016/j.mee.2009.12.081 ◽

2010 ◽

Vol 87 (10) ◽

pp. 2019-2023 ◽

Cited By ~ 20

Author(s):

Ai Hua Chen ◽

Hong Tao Cao ◽

Hai Zhong Zhang ◽

Ling Yan Liang ◽

Zhi Min Liu ◽

...

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

Electrical Properties ◽

Layer Thickness ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Channel Layer ◽

Indium Zinc Oxide

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Enhanced performance of indium zinc oxide thin film transistor by yttrium doping

Applied Surface Science ◽

10.1016/j.apsusc.2013.07.111 ◽

2013 ◽

Vol 284 ◽

pp. 397-404 ◽

Cited By ~ 17

Author(s):

Chu-Chi Ting ◽

Shiep-Ping Chang ◽

Wei-Yang Li ◽

Ching-Hua Wang

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Indium Zinc Oxide ◽

Yttrium Doping

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High-performance solution processed oxide thin film transistor with double-layered amorphous aluminum indium zinc oxide

2016 International Conference on Electronics, Information, and Communications (ICEIC) ◽

10.1109/elinfocom.2016.7562995 ◽

2016 ◽

Author(s):

SeungSoo Ha ◽

Moonsuk Yi ◽

Yooseong Lim ◽

Yongjin Im ◽

Chanhee Park ◽

...

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

High Performance ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

Solution Processed ◽

Indium Zinc Oxide

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Flexible and High-Performance Amorphous Indium Zinc Oxide Thin-Film Transistor Using Low-Temperature Atomic Layer Deposition

ACS Applied Materials & Interfaces ◽

10.1021/acsami.6b11774 ◽

2016 ◽

Vol 8 (49) ◽

pp. 33821-33828 ◽

Cited By ~ 58

Author(s):

Jiazhen Sheng ◽

Hwan-Jae Lee ◽

Saeroonter Oh ◽

Jin-Seong Park

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

Low Temperature ◽

High Performance ◽

Thin Film Transistor ◽

Atomic Layer ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Indium Zinc Oxide ◽

Layer Deposition

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