Model etch profiles for argon and chlorine ion energy distribution functions in inductively coupled discharge plasmas

2002 ◽  
Author(s):  
W. Chen ◽  
B. Abraham-Shrauner ◽  
J.R. Woodworth
Keyword(s):  
Energy Distribution ◽  
Distribution Functions ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Inductively Coupled ◽  
Discharge Plasmas ◽  
Energy Distribution Functions ◽  
Chlorine Ion

Behavior of Time-Resolved Ion Energy Distribution Functions during Ion-Ion Instability

1993 ◽  
Vol 32 (Part 1, No. 10) ◽  
pp. 4756-4760
Author(s):  
Yoshifumi Saitou ◽  
Yoshiharu Nakamura ◽  
Masayoshi Tanaka ◽  
Akio Komori ◽  
Yoshinobu Kawai
Keyword(s):  
Energy Distribution ◽  
Distribution Functions ◽  
Time Resolved ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Energy Distribution Functions
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