Ion distribution functions in inductively coupled radio frequency discharges in argon–chlorine mixtures

1997 ◽  
Vol 15 (6) ◽  
pp. 3015-3023 ◽  
Author(s):  
J. R. Woodworth ◽  
M. E. Riley ◽  
P. A. Miller ◽  
C. A. Nichols ◽  
T. W. Hamilton
Keyword(s):  
Radio Frequency ◽  
Distribution Functions ◽  
Ion Distribution ◽  
Inductively Coupled ◽  
Radio Frequency Discharges

Ion fluxes and energies in inductively coupled radio-frequency discharges containing CHF3

2000 ◽  
Vol 88 (10) ◽  
pp. 5612-5617 ◽  
Author(s):  
Yicheng Wang ◽  
M. Misakian ◽  
A. N. Goyette ◽  
J. K. Olthoff
Keyword(s):  
Radio Frequency ◽  
Ion Fluxes ◽  
Inductively Coupled ◽  
Radio Frequency Discharges

Ion energy and angular distributions in inductively coupled radio frequency discharges in argon

1996 ◽  
Vol 80 (3) ◽  
pp. 1304-1311 ◽  
Author(s):  
Joseph R. Woodworth ◽  
Merle E. Riley ◽  
Dorothy C. Meister ◽  
Ben P. Aragon ◽  
Minh S. Le ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Angular Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Radio Frequency Discharges ◽  
Energy And Angular Distributions

Hybrid model for the calculation of ion distribution functions behind a direct current or radio frequency driven plasma boundary sheath

2001 ◽  
Vol 90 (5) ◽  
pp. 2169-2179 ◽  
Author(s):  
Matthias Kratzer ◽  
Ralf Peter Brinkmann ◽  
Winfried Sabisch ◽  
Harald Schmidt
Keyword(s):  
Radio Frequency ◽  
Hybrid Model ◽  
Direct Current ◽  
Plasma Boundary ◽  
Distribution Functions ◽  
Ion Distribution

scholarly journals Ion energy distribution functions behind the sheaths of magnetized and non-magnetized radio frequency discharges

2013 ◽  
Vol 46 (8) ◽  
pp. 084016 ◽  
Author(s):  
Jan Trieschmann ◽  
Mohammed Shihab ◽  
Daniel Szeremley ◽  
Abd Elfattah Elgendy ◽  
Sara Gallian ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Radio Frequency ◽  
Distribution Functions ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Radio Frequency Discharges ◽  
Energy Distribution Functions
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