Ion fluxes and energies in inductively coupled radio-frequency discharges containing CHF3

2000 ◽  
Vol 88 (10) ◽  
pp. 5612-5617 ◽  
Author(s):  
Yicheng Wang ◽  
M. Misakian ◽  
A. N. Goyette ◽  
J. K. Olthoff
Keyword(s):  
Radio Frequency ◽  
Ion Fluxes ◽  
Inductively Coupled ◽  
Radio Frequency Discharges

Ion energy and angular distributions in inductively coupled radio frequency discharges in argon

1996 ◽  
Vol 80 (3) ◽  
pp. 1304-1311 ◽  
Author(s):  
Joseph R. Woodworth ◽  
Merle E. Riley ◽  
Dorothy C. Meister ◽  
Ben P. Aragon ◽  
Minh S. Le ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Angular Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Radio Frequency Discharges ◽  
Energy And Angular Distributions

Hybrid simulation of radio frequency biased inductively coupled Cl2 plasmas

2021 ◽  
Vol 28 (5) ◽  
pp. 053512
Author(s):  
Lei Tong ◽  
Yu-Ru Zhang ◽  
Jia-Wei Huang ◽  
Ming-Liang Zhao ◽  
De-Qi Wen ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Hybrid Simulation ◽  
Inductively Coupled
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