Hybrid model for the calculation of ion distribution functions behind a direct current or radio frequency driven plasma boundary sheath
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1997 ◽
Vol 15
(6)
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pp. 3015-3023
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2014 ◽
Vol 42
(10)
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pp. 2376-2377
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2011 ◽
Vol 204-210
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pp. 1636-1639
1999 ◽
Vol 119
(6)
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pp. 866-871
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2018 ◽
Vol 60
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pp. 105003
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