Optimized time-of-flight secondary ion mass spectroscopy depth profiling with a dual beam technique

1997 ◽  
Vol 15 (3) ◽  
pp. 460-464 ◽  
Author(s):  
K. Iltgen ◽  
C. Bendel ◽  
A. Benninghoven ◽  
E. Niehuis
Keyword(s):  
Mass Spectroscopy ◽  
Time Of Flight ◽  
Depth Profiling ◽  
Secondary Ion Mass Spectroscopy ◽  
Dual Beam ◽  
Secondary Ion ◽  
Beam Technique

An investigation of the wear track on DLC (a-C:H) film by time-of-flight secondary ion mass spectroscopy

2001 ◽  
Vol 146-147 ◽  
pp. 378-383 ◽  
Author(s):  
Haruyo Fukui ◽  
Miki Irie ◽  
Yoshiharu Utsumi ◽  
Kazuhiko Oda ◽  
Hisanori Ohara
Keyword(s):  
Mass Spectroscopy ◽  
Wear Track ◽  
Time Of Flight ◽  
Secondary Ion Mass Spectroscopy ◽  
Secondary Ion
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