Characteristics of hydrogenated aluminum nitride films prepared by radio frequency reactive sputtering and their application to surface acoustic wave devices

1997 ◽  
Vol 15 (2) ◽  
pp. 390-393 ◽  
Author(s):  
Yoon-Joong Yong ◽  
Jai-Young Lee
Keyword(s):  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Radio Frequency ◽  
Surface Acoustic Wave ◽  
Reactive Sputtering ◽  
Acoustic Wave Devices

Preparation of aluminum nitride thin films by reactive sputtering and their applications to GHz‐band surface acoustic wave devices

1994 ◽  
Vol 64 (2) ◽  
pp. 166-168 ◽  
Author(s):  
Hiroshi Okano ◽  
Naoki Tanaka ◽  
Yusuke Takahashi ◽  
Toshiharu Tanaka ◽  
Kenichi Shibata ◽  
...  
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Reactive Sputtering ◽  
Acoustic Wave Devices

scholarly journals Discrete microfluidics based on aluminum nitride surface acoustic wave devices

2014 ◽  
Vol 18 (4) ◽  
pp. 537-548 ◽  
Author(s):  
J. Zhou ◽  
H. F. Pang ◽  
L. Garcia-Gancedo ◽  
E. Iborra ◽  
M. Clement ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Devices

Piezoelectric Aluminum Nitride Films Deposited by Triode Sputtering for Surface Acoustic Wave Devices

2002 ◽  
Vol 273 (1) ◽  
pp. 249-254 ◽  
Author(s):  
M. B. Assouar ◽  
O. Elmazria ◽  
V. Mortet ◽  
P.-Y. Jouan ◽  
M. A. Djouadi ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Devices

Aluminum nitride on silicon surface acoustic wave devices

1981 ◽  
Vol 39 (11) ◽  
pp. 878-879 ◽  
Author(s):  
L. G. Pearce ◽  
R. L. Gunshor ◽  
R. F. Pierret
Keyword(s):  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Silicon Surface ◽  
Acoustic Wave Devices
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