Fabrication of c-axis oriented ZnO/AlN thin films prepared by radio frequency reactive sputtering and development of ZnO/AlN layered structure surface acoustic wave devices

2002 ◽  
Vol 20 (1) ◽  
pp. 42 ◽  
Author(s):  
Yoon-Joong Yong ◽  
Youn-Seon Kang ◽  
Paul S. Lee ◽  
Jai-Young Lee
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Radio Frequency ◽  
Surface Acoustic Wave ◽  
Layered Structure ◽  
Reactive Sputtering ◽  
Structure Surface ◽  
Acoustic Wave Devices

Preparation of aluminum nitride thin films by reactive sputtering and their applications to GHz‐band surface acoustic wave devices

1994 ◽  
Vol 64 (2) ◽  
pp. 166-168 ◽  
Author(s):  
Hiroshi Okano ◽  
Naoki Tanaka ◽  
Yusuke Takahashi ◽  
Toshiharu Tanaka ◽  
Kenichi Shibata ◽  
...  
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Reactive Sputtering ◽  
Acoustic Wave Devices

High-Frequency Surface Acoustic Wave Devices Based on ZnO/SiC Layered Structure

2019 ◽  
Vol 40 (1) ◽  
pp. 103-106 ◽  
Author(s):  
Sulei Fu ◽  
Weibiao Wang ◽  
Lirong Qian ◽  
Qi Li ◽  
Zengtian Lu ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Layered Structure ◽  
High Frequency ◽  
Acoustic Wave Devices
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