Preparation of aluminum nitride thin films by reactive sputtering and their applications to GHz‐band surface acoustic wave devices

1994 ◽  
Vol 64 (2) ◽  
pp. 166-168 ◽  
Author(s):  
Hiroshi Okano ◽  
Naoki Tanaka ◽  
Yusuke Takahashi ◽  
Toshiharu Tanaka ◽  
Kenichi Shibata ◽  
...  
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Reactive Sputtering ◽  
Acoustic Wave Devices

scholarly journals Discrete microfluidics based on aluminum nitride surface acoustic wave devices

2014 ◽  
Vol 18 (4) ◽  
pp. 537-548 ◽  
Author(s):  
J. Zhou ◽  
H. F. Pang ◽  
L. Garcia-Gancedo ◽  
E. Iborra ◽  
M. Clement ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Devices

scholarly journals Stability studies of ZnO and AlN thin film acoustic wave devices in acid and alkali harsh environments

RSC Advances ◽  
2020 ◽  
Vol 10 (33) ◽  
pp. 19178-19184
Author(s):  
Shuo Xiong ◽  
Xudong Liu ◽  
Jian Zhou ◽  
Yi Liu ◽  
Yiping Shen ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Lab On A Chip ◽  
Harsh Environments ◽  
Stability Studies ◽  
Piezoelectric Thin Films ◽  
Saw Devices ◽  
Acoustic Wave Devices

Surface acoustic wave (SAW) devices based on piezoelectric thin-films such as ZnO and AlN are widely used in sensing, microfluidics and lab-on-a-chip applications.

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