Use of fluorine-doped silicon oxide for temperature compensation of radio frequency surface acoustic wave devices

2012 ◽  
Vol 59 (1) ◽  
pp. 135-138 ◽  
Author(s):  
S. Matsuda ◽  
M. Hara ◽  
M. Miura ◽  
T. Matsuda ◽  
U. M. Ueda ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Radio Frequency ◽  
Surface Acoustic Wave ◽  
Temperature Compensation ◽  
Silicon Oxide ◽  
Doped Silicon ◽  
Acoustic Wave Devices

Temperature Compensation for Ball Surface Acoustic Wave Devices and Sensor Using Frequency Dispersion

2006 ◽  
Vol 45 (5B) ◽  
pp. 4500-4504 ◽  
Author(s):  
Takuya Nakatsukasa ◽  
Shingo Akao ◽  
Tsuneo Ohgi ◽  
Noritaka Nakaso ◽  
Takuji Abe ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Temperature Compensation ◽  
Frequency Dispersion ◽  
Ball Surface ◽  
Acoustic Wave Devices
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