5GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography

2006 ◽  
Vol 88 (22) ◽  
pp. 223504 ◽  
Author(s):  
P. Kirsch ◽  
M. B. Assouar ◽  
O. Elmazria ◽  
V. Mortet ◽  
P. Alnot
Keyword(s):  
Electron Beam ◽  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Layered Structure ◽  
Electron Beam Lithography ◽  
Acoustic Wave Devices

High-Frequency Surface Acoustic Wave Devices Based on ZnO/SiC Layered Structure

2019 ◽  
Vol 40 (1) ◽  
pp. 103-106 ◽  
Author(s):  
Sulei Fu ◽  
Weibiao Wang ◽  
Lirong Qian ◽  
Qi Li ◽  
Zengtian Lu ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Layered Structure ◽  
High Frequency ◽  
Acoustic Wave Devices

scholarly journals Discrete microfluidics based on aluminum nitride surface acoustic wave devices

2014 ◽  
Vol 18 (4) ◽  
pp. 537-548 ◽  
Author(s):  
J. Zhou ◽  
H. F. Pang ◽  
L. Garcia-Gancedo ◽  
E. Iborra ◽  
M. Clement ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Devices

Preparation of aluminum nitride thin films by reactive sputtering and their applications to GHz‐band surface acoustic wave devices

1994 ◽  
Vol 64 (2) ◽  
pp. 166-168 ◽  
Author(s):  
Hiroshi Okano ◽  
Naoki Tanaka ◽  
Yusuke Takahashi ◽  
Toshiharu Tanaka ◽  
Kenichi Shibata ◽  
...  
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Reactive Sputtering ◽  
Acoustic Wave Devices

Piezoelectric Aluminum Nitride Films Deposited by Triode Sputtering for Surface Acoustic Wave Devices

2002 ◽  
Vol 273 (1) ◽  
pp. 249-254 ◽  
Author(s):  
M. B. Assouar ◽  
O. Elmazria ◽  
V. Mortet ◽  
P.-Y. Jouan ◽  
M. A. Djouadi ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Devices
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