Very high frequency capacitively coupled discharges for large area processing

1996 ◽  
Vol 14 (5) ◽  
pp. 2790-2794 ◽  
Author(s):  
M. Meyyappan ◽  
M. J. Colgan
Keyword(s):  
High Frequency ◽  
Large Area ◽  
Very High Frequency ◽  
Capacitively Coupled ◽  
Very High

Effects of Driving Frequency on the Translational Temperature and Absolute Density of Si Atoms in Very High Frequency Capacitively Coupled SiF4Plasmas

2003 ◽  
Vol 42 (Part 2, No. 12B) ◽  
pp. L1532-L1534 ◽  
Author(s):  
Takayuki Ohta ◽  
Masaru Hori ◽  
Tetsuro Ishida ◽  
Toshio Goto ◽  
Masafumi Ito ◽  
...  
Keyword(s):  
High Frequency ◽  
Driving Frequency ◽  
Very High Frequency ◽  
Capacitively Coupled ◽  
Translational Temperature ◽  
Absolute Density ◽  
Very High

Improving plasma uniformity using lens-shaped electrodes in a large area very high frequency reactor

2004 ◽  
Vol 95 (9) ◽  
pp. 4559-4564 ◽  
Author(s):  
H. Schmidt ◽  
L. Sansonnens ◽  
A. A. Howling ◽  
Ch. Hollenstein ◽  
M. Elyaakoubi ◽  
...  
Keyword(s):  
High Frequency ◽  
Large Area ◽  
Very High Frequency ◽  
Very High
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