Improving plasma uniformity using lens-shaped electrodes in a large area very high frequency reactor

H. Schmidt; L. Sansonnens; A. A. Howling; Ch. Hollenstein; M. Elyaakoubi; J. P. M. Schmitt

doi:10.1063/1.1690096

Improving plasma uniformity using lens-shaped electrodes in a large area very high frequency reactor

Journal of Applied Physics ◽

10.1063/1.1690096 ◽

2004 ◽

Vol 95 (9) ◽

pp. 4559-4564 ◽

Cited By ~ 104

Author(s):

H. Schmidt ◽

L. Sansonnens ◽

A. A. Howling ◽

Ch. Hollenstein ◽

M. Elyaakoubi ◽

...

Keyword(s):

High Frequency ◽

Large Area ◽

Very High Frequency ◽

Very High

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Observation of the standing wave effect in large-area, very-high-frequency capacitively coupled plasmas by using a fiber Bragg grating sensor

Journal of Applied Physics ◽

10.1063/1.5024835 ◽

2018 ◽

Vol 123 (22) ◽

pp. 223304 ◽

Cited By ~ 1

Author(s):

Dao-Man Han ◽

Yong-Xin Liu ◽

Fei Gao ◽

Xiang-Yu Wang ◽

Ang Li ◽

...

Keyword(s):

Fiber Bragg Grating ◽

Standing Wave ◽

High Frequency ◽

Large Area ◽

Very High Frequency ◽

Wave Effect ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

Bragg Grating Sensor ◽

Very High

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Simulations of standing wave effect, stop band effect, and skin effect in large-area very high frequency symmetric capacitive discharges

Plasma Science and Technology ◽

10.1088/2058-6272/abe18f ◽

2021 ◽

Vol 23 (3) ◽

pp. 035401

Author(s):

Jiankai LIU ◽

Yuru ZHANG ◽

Kai ZHAO ◽

Deqi WEN ◽

Younian WANG

Keyword(s):

Standing Wave ◽

High Frequency ◽

Skin Effect ◽

Stop Band ◽

Large Area ◽

Very High Frequency ◽

Wave Effect ◽

Capacitive Discharges ◽

Very High

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Study of space voltage distribution between large-area parallel-plate electrodes for very high frequency plasma enhanced chemical vapor deposition

Acta Physica Sinica ◽

10.7498/aps.57.5105 ◽

2008 ◽

Vol 57 (8) ◽

pp. 5105

Author(s):

Ge Hong ◽

Zhang Xiao-Dan ◽

Yue Qiang ◽

Zhao Jing ◽

Zhao Ying

Keyword(s):

Vapor Deposition ◽

High Frequency ◽

Parallel Plate ◽

Chemical Vapor ◽

Voltage Distribution ◽

Large Area ◽

Very High Frequency ◽

High Frequency Plasma ◽

Frequency Plasma ◽

Very High

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A technique for uniform generation of very-high-frequency plasma suited to large-area thin-film deposition

Applied Physics Letters ◽

10.1063/1.2176867 ◽

2006 ◽

Vol 88 (8) ◽

pp. 081502 ◽

Cited By ~ 13

Author(s):

H. Yamakoshi ◽

K. Satake ◽

Y. Takeuchi ◽

H. Mashima ◽

T. Aoi

Keyword(s):

Thin Film ◽

High Frequency ◽

Thin Film Deposition ◽

Film Deposition ◽

Large Area ◽

Very High Frequency ◽

High Frequency Plasma ◽

Frequency Plasma ◽

Uniform Generation ◽

Very High

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Generation of uniform large-area very high frequency plasmas by launching two specific standing waves simultaneously

Journal of Applied Physics ◽

10.1063/1.4895703 ◽

2014 ◽

Vol 116 (10) ◽

pp. 103307 ◽

Cited By ~ 4

Author(s):

Hsin-Liang Chen ◽

Yen-Cheng Tu ◽

Cheng-Chang Hsieh ◽

Deng-Lain Lin ◽

Keh-Chyang Leou

Keyword(s):

High Frequency ◽

Standing Waves ◽

Large Area ◽

Very High Frequency ◽

Very High

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Very high frequency capacitively coupled discharges for large area processing

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580201 ◽

1996 ◽

Vol 14 (5) ◽

pp. 2790-2794 ◽

Cited By ~ 22

Author(s):

M. Meyyappan ◽

M. J. Colgan

Keyword(s):

High Frequency ◽

Large Area ◽

Very High Frequency ◽

Capacitively Coupled ◽

Very High

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Experimental investigation of the electromagnetic effect and improvement of the plasma radial uniformity in a large-area, very-high frequency capacitive argon discharge

Plasma Science and Technology ◽

10.1088/2058-6272/abf72a ◽

2021 ◽

Author(s):

Daoman Han ◽

Zixuan Su ◽

Kai Zhao ◽

Yongxin Liu ◽

Fei Gao ◽

...

Keyword(s):

Experimental Investigation ◽

High Frequency ◽

Electromagnetic Effect ◽

Large Area ◽

Very High Frequency ◽

Argon Discharge ◽

Very High

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Faculty Opinions recommendation of Comparison of residual stromal bed thickness measurement among very high-frequency digital ultrasound, intraoperative handheld ultrasound, and optical coherence tomography.

Faculty Opinions – Post-Publication Peer Review of the Biomedical Literature ◽

10.3410/f.13477033.14857144 ◽

2012 ◽

Author(s):

Jason Stahl ◽

Jason Philip Brinton

Keyword(s):

Optical Coherence Tomography ◽

High Frequency ◽

Thickness Measurement ◽

Optical Coherence ◽

Very High Frequency ◽

Handheld Ultrasound ◽

Bed Thickness ◽

Very High

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Nanostructures for Very High Frequency Electronics

10.21236/ada416024 ◽

2002 ◽

Author(s):

Boris Gelmont

Keyword(s):

High Frequency ◽

Very High Frequency ◽

Very High

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Experimental Investigation of very High Frequency Slot Antenna on M-60A-1 Tank

10.21236/adb018152 ◽

1977 ◽

Author(s):

D. V. Campbell ◽

William Kennebeck ◽

A. Zanella ◽

Paul Sexton

Keyword(s):

Experimental Investigation ◽

High Frequency ◽

Slot Antenna ◽

Very High Frequency ◽

Very High

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